加载纤维素敏感膜的小型化微波湿度传感器  

Miniaturized Microwave Humidity Sensor Loaded with Cellulose Sensitive Film

作　　者：熊荣 陈昌明[1] 李娜 李万里 XIONG Rong;CHEN Chang-ming;LI Na;LI Wan-li(College of Communication Engineering,Chengdu University of Information Technology,Chengdu 610225,China)

机构地区：[1]成都信息工程大学通信工程学院,四川成都610225

出　　处：《仪表技术与传感器》2021年第4期4-7,33,共5页Instrument Technique and Sensor

摘　　要：提出了一种由互补开口谐振环(CSRR)和叉指电容(IDC)结构组合而成的小型化湿度传感器。利用CSRR-IDC结构的设计,使得传感器在获得高灵敏度的同时,保持着小尺寸。此外,通过加载纤维素敏感膜,进一步增强其湿度灵敏度。根据相对湿度对有效介电常数的影响引起传感器频率偏移的原理,对谐振器的谐振频率偏移量进行测量。在11%~97%的相对湿度(RH)范围内测试,湿度灵敏度达到了610.46 kHz/RH,具有良好的稳定性。测试与仿真结果吻合较好,可用于人体可穿戴设备的湿度检测。A kind of miniaturized humidity sensor structure which is composed of complementary split ring resonator(CSRR)and inter-digital capacitor(IDC)was proposed in this paper.Using the design of CSRR-IDC structure,the sensor can not only obtain high sensitivity but keep small size as well.Moreover,the humidity sensitivity was further enhanced by loading cellulose sensitive film.According to the principles of sensor frequency shift due to the effective dielectric constant,the resonance frequency shift was measured.The results show that the humidity sensitivity reaches 610.46 kHz/RH in the range of 11%to 97%,which has good stability.The measured data show good agreement with the simulated ones.It can be a candidate for the humidity detection of wearable devices.

关 键 词：互补开口谐振环 叉指电容 湿度传感器 相对湿度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]