基于十字梁结构的石墨烯高压压力传感器设计  

Design of Graphene High Pressure Sensor Based on Cross Beam Structure

作　　者：薛伟 侯文[1,2] 王俊强[2,3] 齐越 严赛美 XUE Wei;HOU Wen;WANG Jun-qiang;QI Yue;YAN Sai-mei(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学信息与通信工程学院,山西太原030051 [2]中北大学前沿交叉科学研究院,山西太原030051 [3]中北大学仪器与电子学院,山西太原030051

出　　处：《仪表技术与传感器》2021年第4期20-23,56,共5页Instrument Technique and Sensor

基　　金：兵科基金(6141B012902)。

摘　　要：设计了一种基于十字梁结构的石墨烯高压压力传感器。传感器由硅基片和弹簧钢膜片组成,石墨烯布置于硅基片的十字梁根部处。通过COMSOL有限元软件进行力学仿真表明,对十字梁施加8μm固定位移,石墨烯的横向应变可达到0.46%;被测压力为400 MPa时,钢膜中心位移达到7.9μm,与十字梁所受应变最大值施加的固定位移8μm接近,同时膜片所承受最大应力为511 MPa,远未发生塑性变形。最后对结构进行模态分析,传感器一阶频率为223 kHz,满足设计要求。A graphene high pressure sensor based on cross beam structure was designed.The sensor consists of a silicon substrate and a spring steel diaphragm with graphene arranged at the base of the cross beam of the silicon substrate.Mechanical simulation with COMSOL finite element software shows that the transverse strain of graphene can reach 0.46%when the crossbeam is applied with a fixed displacement of 8μm.When the measured pressure was 400 MPa,the central displacement of the membrane reached 7.9μm,which was close to the fixed displacement of 8μm applied to the maximum strain of the cross beam,and the maximum stress of the membrane was 511 MPa,far from plastic deformation.Finally,the modal analysis of the structure shows that the first-order frequency of the sensor is 223 kHz,which meets the design requirements.

关 键 词：十字梁石墨烯 高压压力传感器 COMSOL有限元分析软件 频率 

分 类 号：TN402[电子电信—微电子学与固体电子学]