基于LTCC工艺的低通滤波器设计与实现  

Design and Implementation of Low-Pass Filter Based on LTCC Process

作　　者：张博 肖宝玉 ZHANG Bo;XIAO Baoyu(Xi'an University of Posts and Telecommunications,School of Electronic Engineering,Xi'an Shaanxi 710121,China)

机构地区：[1]西安邮电大学电子工程学院,陕西西安710121

出　　处：《电子器件》2021年第2期278-281,共4页Chinese Journal of Electron Devices

基　　金：陕西省重点研发计划项目(2018ZDXM-GY-010);西安市集成电路重大专项项目(201809174CY3JC16)。

摘　　要：为了实现具有高Q值电容电感的小型化滤波器,采用低温共烧陶瓷(LTCC)工艺分别构建了垂直螺旋式电感和垂直直插式电容,利用电容电感的参数提取公式并结合HFSS软件进行优化仿真,获得具有高Q值的电容电感模型,并根据此模型来设计一款DC-500 MHz小型化低通滤波器。最终经过实际测试表明该低通滤波器性能为:在0~500 MHz插入损耗优于-0.5 dB,回波损耗优于-18 dB,带外抑制在1 GHz处有-30 dB,在1.5 GHz处有-50 dB。In order to achieve a miniaturized filter with high Q capacitor and inductance, this will use LTCC process to construct a vertical spiral inductor and a vertical in-line capacitor. Using the parameter extraction formula of the capacitor and inductor, optimizing simulation with HFSS software, capacitor and inductor model with Q-value is acquired and a DC-500 MHz miniaturized low-pass filter based on this model is designed. The actual test shows the performance of the low-pass filter. The insertion loss is better than-0.5 dB and the return loss is better than-18 dB at 0~500 MHz. The out-of-band suppression is-30 dB at 1 GHz, and-50 dB at 1.5 GHz.

关 键 词：低通滤波器 低温共烧陶瓷工艺 高Q值 小型化 

分 类 号：TN713.4[电子电信—电路与系统]