基于中子衍射的氧化锌单晶应力空间分布研究  

Study on Spatial Stress Distribution of Zinc Oxide Single Crystal Based on Neutron Diffraction

作　　者：钟昌杰 田懿 樊龙 王虹[2] 张颖娟[1] 彭丽萍[1] 熊政伟 李佳[1] 吴卫东[1] ZHONG Chang-jie;TIAN Yi;FAN Long;WANG Hong;ZHANG Ying-juan;PENG Li-ping;XIONG Zheng-wei;LI Jia;WU Wei-dong(Research Center of Laser Fusion,CAEP,Sichuan Mianyang 621900;Key Laboratory for Neutron Physics of Chinese Academy of Engineering Physics,Institute of Nuclear Physics and Chemistry,Sichuan Mianyang 621900;Physical Institute,Southwest University of Science and Technology,Sichuan Mianyang 621900,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]中国工程物理研究院中子物理重点实验室,四川绵阳621900 [3]西南科技大学理学院,四川绵阳621900

出　　处：《广州化工》2021年第9期37-40,共4页GuangZhou Chemical Industry

基　　金：中国工程物理研究院中子物理重点实验室基金(NO:2018BB02);国家自然科学基金(NO:11904299、NO:11905199,NO:U1930124)。

摘　　要：与传统应力分布分析方法相比,基于中子衍射的单晶应力分布分析具有无损,穿透深度大(厘米级)等优势。本工作采用残余应力中子衍射仪对化学气相输运法生长的氧化锌单晶块体进行了残余应力测试和分析,结果表明利用该方法生长的氧化锌单晶内部残余应力空间分布随时间增加而变化的趋势,应力分布不对称转为对称,且应力的绝对值再变小,表明这种方法有助于生长残余应力较小的氧化锌单晶块体。Compared with the traditional stress distribution analysis method,the single crystal stress distribution analysis based on neutron diffraction has the advantages of non-destructive and large penetration depth(centimeter level).A residual stress neutron diffractometer was used to test and analyze the residual stress of bulk zinc oxide single crystal grown by chemical vapor transport.The results showed that the spatial distribution of residual stress in the zinc oxide single crystal changed with growth time.The stress distribution changed from asymmetric to symmetric,and the absolute value of the stress became smaller again,indicating that this method was helpful for the growth of zinc oxide single crystal blocks with small residual stress.

关 键 词：氧化锌 残余应力 化学气相输运法 

分 类 号：O572.2[理学—粒子物理与原子核物理]