物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应  

Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property

作　　者：曹庆平[1] 吕林波 王晓东[1] 蒋建中[1] CAO Qingping;LV Linbo;WANG Xiaodong;JIANG Jianzhong(International Center for New-Structured Materials(ICNSM),School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学材料科学与工程学院新结构材料国际研究中心,杭州310027

出　　处：《金属学报》2021年第4期473-490,共18页Acta Metallurgica Sinica

基　　金：国家重点研发计划项目Nos.2016YFB0700201和2016YFB0701203;国家自然科学基金项目Nos.51871198和51671170。

摘　　要：金属玻璃薄膜是在金属玻璃的基础上发展出来的一种新型薄膜材料,一方面继承无序原子排列结构所赋予的优异物理、化学和机械性能,另一方面有可能通过调整物理气相沉积工艺,构筑界面,制备纳米结构金属玻璃薄膜,克服块体金属玻璃的本征脆性。近年来,金属玻璃薄膜在各个领域快速发展,引起广泛的关注,已经成为新的研究热点。本文主要通过回顾最近几年关于金属玻璃薄膜制备参数对微观结构和性能的影响以及样品尺寸效应,分析、总结研究工作进展,并对未来可能的金属玻璃薄膜研究进行简单展望,旨在为从事金属玻璃薄膜研究的人员提供参考。Metallic glass thin film(MGTF) is a new thin film material developed based on metallic glasses. It has excellent physical, chemical, and mechanical properties owing to its disordered atomic packing structure. Moreover, nanostructured MGTF can be synthesized by adjusting the process of physical vapor deposition to construct nanostructure interfaces and overcome the intrinsic brittleness of bulky metallic glasses. Recently, the rapid development of MGTF in various fields has attracted extensive attention and has become a new research hotspot. In this paper, by reviewing the influence of preparation parameters on the microstructure and properties of MGTF, and sample size effect. In this manner, research progress is analyzed and summarized, and research prospects are briefly proposed to provide reference for researchers engaged in the study of MGTF.

关 键 词：金属玻璃薄膜 磁控溅射 尺寸效应 弹性变形 塑性变形 硬度 

分 类 号：TG139.8[一般工业技术—材料科学与工程]