电弧/溅射复合沉积技术的发展及其在刀具涂层中的应用  

Development of Hybrid Arc/Sputtering Deposition Techniques for Tool Coatings

作　　者：张权[1] 耿东森[1] 许雨翔 王启民[1] 李柏荣 ZHANG Quan;GENG Dong-sen;XU Yu-xiang;WANG Qi-min;LI Bo-rong(School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;Guangdong Zhenhua Technology Co.,Ltd,Zhaoqing 526000,China)

机构地区：[1]广东工业大学机电工程学院,广州510006 [2]广东振华科技股份有限公司,广东肇庆526000

出　　处：《表面技术》2021年第5期20-35,101,共17页Surface Technology

基　　金：国家自然科学基金(51875109,51801032);国家重点研发计划(2017YFE0125400);肇庆市西江创新创业团队项目。

摘　　要：通过电弧/溅射复合技术沉积刀具涂层,不仅可以规避单一沉积技术的固有缺陷,拓宽材料的选择范围,且其纳米多层结构能够有效结合不同组元的特性,协同提升涂层性能,有望为难加工材料的切削提供高性能涂层解决方案。首先对电弧/溅射复合技术的发展历史进行了回顾,概述了早期"ArcBond Sputtering"技术凭借多功能阴极弧源实现同一靶材在电弧与溅射两种沉积模式的自动切换,有效结合不同沉积技术的优势。在此基础上,重点综述了近年国内外研究机构及企业应用端关于复合沉积技术在刀具涂层领域的研究进展,包括利用电弧/溅射复合沉积制备高硬度纳米复合结构涂层;通过磁控溅射拓宽靶材成分的选择范围,电弧层与溅射层交替沉积制备具有摩擦自适应性的纳米多层刀具涂层;设计从底层电弧支持层向顶层非晶功能层过渡的涂层结构,采用高功率脉冲磁控溅射沉积非晶层(例如SiBCN与TiB_2),打断电弧层柱状晶的连续生长,涂层表现出致密的结构与优异的高温性能。此外,还总结了笔者对电弧/溅射复合沉积AlTiN以及AlTiN/AlCrN涂层的性能研究。最后,对国内复合沉积刀具涂层的应用前景以及尚待解决的科学问题进行了总结与展望。Combining arc ion plating and magnetron sputtering to achieve alternate deposition on the nanoscale can avoid the inherent drawback of individual deposition technique and broaden the selection of materials.Additionally,the compositionally modulated nano-multilayer structure can combine different constituents’features and synergistically improve the hardness and toughness.On this basis,a new generation of high-performance tool coatings can be expected.The paper briefly reviews the development history of hybrid arc/sputtering deposition.The early Arc Bond Sputtering technology realizes automatic switching between arc-evaporation and sputtering modes of the same target by virtue of the multifunctional cathode arc source and combines the advantages of different deposition technologies.The relevant research progress of hybrid tool coatings in academia and industry is summarized,including high-hardness nanocomposite coatings prepared by hybrid arc/sputtering,a wider range of target materials by using magnetron sputtering,the alternating deposition of arc layer and sputtering layer to fabricate nano-multilayer tool coatings with friction adaptability,coating design based on the transition from the bottom arc support layer to the top amorphous functional layer,interruption to the continuous growth of columnar crystals of arc layers using the amorphous layers deposited by high-power pulsed magnetron sputtering,such as SiBCN and TiB2,which gives coatings dense microstructure and excellent high-temperature properties.Besides,the study on the properties of hybrid AlTiN and AlTiN/AlCrN coatings is also reported.Finally,the status of the development and application of domestic hybrid deposition tool coatings and the unresolved scientific problems are summarized and expected.

关 键 词：复合物理气相沉积 刀具涂层 微观结构 力学性能 切削性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]