柔性压阻式压力传感器的研究进展  

Advances in flexible piezoresistive pressure sensor

作　　者：李凤超 孔振 吴锦华 纪欣宜 梁嘉杰 Li Feng-Chao;Kong Zhen;Wu Jin-Hua;Ji Xin-Yi;Liang Jia-Jie(School of Mateirials Science and Engineering,Nankai University,Tianjin 300350,China)

机构地区：[1]南开大学材料科学与工程学院,天津300350

出　　处：《物理学报》2021年第10期33-50,共18页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:51673099,51872146)资助的课题.

摘　　要：柔性压阻式压力传感器作为柔性压力传感器的重要分支,具有结构简单、灵敏度高、工作范围大、响应速度快及稳定性高等特点,在人类运动行为探测、健康监测、仿生电子皮肤开发及人机交互等领域均具有潜在发展需求.但是截至目前,如何同时实现低成本、高性能、低能耗和自驱动仍旧是柔性压阻式压力传感器未来所面临的挑战,而新型传感机制的开发、新型功能化纳米材料的融合及柔性器件的新型制备工艺将是未来发展的方向.本文综述了近年来柔性压阻式压力传感器的研究进展,从传感机制出发,对柔性压阻式压力传感器的活性层材料种类和微结构设计类型进行了总结,最后对其未来的潜在应用进行了展望.In recent years,the flexible piezoresistive pressure sensor has attracted widespread attention due to the trend of improved wearable electronics applied to the field of electronic skin,disease diagnosis,motion detection and health monitoring.Here in this paper,the latest progress of the exploitation of flexible piezoresistive pressure sensors is reviewed in terms of sensing mechanism,selection of sensing materials,structural design and their advanced application.Firstly,the sensing mechanism of piezoresistive pressure sensors is generally introduced from the band structure of semiconductor materials,seepage theory and tunneling effect of conductive polymer composites and changes in interface contact resistance.Based on these sensing mechanisms,various flexible piezoresistive pressure sensors with high sensitivity,broad sensing range and fast response time have been developed.The selection of composition materials and microstructural design in flexible piezoresistive pressure sensor to implement the optimization of sensing performance are emphatically presented in this review.The composition materials including organic polymer material and inorganic nanomaterial based on twodimensional(2D)materials such as graphene and MXene are intensively exhibited.In addition to the above characteristics,these kinds of pressure sensors exhibit high mechanical reversibility and low detection limit,which is essential for detecting the minor motions like respiratory rate and pulse.Moreover,the well-designed structures applied to the composition analysis are also overviewed,such as the sea urchin-like structure,spongy porous structure and regular structure.Various designed structures provide further properties like stability for the flexible pressure sensor.However,comparing with traditional pressure sensor,the mass production and application of flexible pressure sensor are confronting several barriers,like the high cost of raw materials and relatively complex manufacturing processes.How to achieve the low cost and low energy consu

关 键 词：柔性压阻式压力传感器 传感原理 传感应用 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]