基于SPM与DIC技术的应变场测量改进方法  

Improved Strain Field Measurement Based on SPM and DIC

作　　者：柏文琦 向德 王柠莎 BAI Wenqi;XIANG De;WANG Ningsha(Hunan Institute of Metrology and Test,Changsha 410014,China)

机构地区：[1]湖南省计量检测研究院,长沙410014

出　　处：《计量科学与技术》2021年第3期75-79,8,共6页Metrology Science and Technology

基　　金：湖南省科技创新计划资助(2018XK2008)。

摘　　要：微纳米尺度下的应力/应变测量方法是实验力学研究的重要方向之一。现有的许多研究忽略了待测试件表面的散斑图质量、系统随机误差、计算流程等因素对最终的应变场测量精度的影响。围绕基于扫描探针显微镜的数据图像相关技术实现过程,提出科学的评估准则、优化位移场计算方法。实验结果表明,所提出的应变场计算方法在精度控制方面的性能得到显著提升。The strain field measurement on the micro/nano scale is one of the most important research topics of experimental mechanics.Most existing research ignored the influences of the speckle image quality,the systematic random error,calculation processes and other factors on the accuracy of strain field measurement.In order to overcome the above challenges,the implementation of the Digital Image Correlation(DIC)technique based on the Scanning Probe Microscope(SPM)was investigated,and scientific evaluation criteria and an improved displacement field calculation method were proposed.Experimental results showed that the estimation performance of the displacement field was significantly enhanced in terms of accuracy control.

关 键 词：计量学 应变场测量 扫描探针显微镜 数字图像相关法 平均灰度梯度 微纳米计量 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]