3.2~3.8μm和4.9~5.4μm红外双色滤光片的研制  

Research on infrared dual-color filters with 3.2~3.8μm and 4.9~5.4μm bands

作　　者：周晟[1,3] 王凯旋 刘定权[1,2,3] 胡金超 李耀鹏[1] 王曙光 ZHOU Sheng;WANG Kai-xuan;LIU Ding-quan;HU Jin-chao;LI Yao-peng;WANG Shu-guang(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;School of Physical Science and Technology,Shanghai Tech University,Shanghai 200031,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]上海科技大学物质科学与技术学院,上海200031 [3]中国科学院大学,北京100049

出　　处：《中国光学》2021年第3期536-543,共8页Chinese Optics

基　　金：国家自然科学基金(No.61705248)。

摘　　要：双色滤光片在其任意一个几何位置上,均能够有效透过两个精确控制的光谱通道,它可以提升光学探测装置对目标的识别能力。本文选用单晶Ge作为基片,Ge和ZnSe分别作为高低折射率膜层材料,研制了一种包含3.2~3.8μm(通道1)和4.9~5.4μm(通道2)两个通道的红外双色滤光片。在高真空中以热蒸发的方式镀制了滤光片的光学膜层,采用单波长的极值百分比光学监控(POEM)方法控制膜层的光学厚度。在100 K低温下,通道1的平均透射率为94.2%,顶部波纹幅度为5.7%;通道2的平均透射率为96.5%,顶部波纹幅度为0.6%。在两个通道之间(4.0~4.7μm)的截止区域内,平均透射率小于0.16%。该红外双色滤光片具有良好的光学稳定性,有利于高速运动目标的识别。The dual-color(dual band-pass)filter is a new type of optical element that includes two precisely controlled spectral channels at any geometric position and can improve the target recognition ability of optical detection devices.Single crystal Ge is used as a substrate,and Ge and ZnSe are used as high(H)and low(L)reflective index thin film materials,respectively.An infrared dual-color filter is designed with two bandpass channels:3.2~3.8μm(channel 1)and 4.9~5.4μm(channel 2).Thin films are fabricated by thermal evaporation in a high vacuum chamber,and the film thickness are monitored using the POEM(Percent of Optical Extreme Monitoring)strategy.At a working temperature of 100 K,the average transmittance of channel 1 was 94.2%,and its top ripple amplitude was 5.7%;the average transmittance of channel 2 was 96.5%,and its top ripple amplitude was 0.6%.In the cut-off range between the two channels(4.0~4.7μm),the average transmittance was no more than 0.16%.The infrared dual-color filter has good optical stability,which is conducive to the recognition of high-speed moving targets.

关 键 词：光学薄膜 双色滤光片 红外 低温光谱 

分 类 号：O484[理学—固体物理]