利用反射式圆光栅的振镜转角测量  

Rotational angle measurement of galvanometer using reflective circular grating

作　　者：刘永坤 丁红昌[2] 向阳[1] 吕思航 LIU Yong-kun;DING Hong-chang;XIANG Yang;LU Si-hang(College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;College of Mechanical and Electrical Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学机电工程学院,吉林长春130022

出　　处：《中国光学》2021年第3期643-651,共9页Chinese Optics

基　　金：国家重点研发计划重大科学仪器设备开发(No.2017YFF0105304);吉林省科技发展计划重点研发项目(No.20200401117GX)。

摘　　要：为了实现振镜旋转角度的高精度测量,设计了一种利用反射式圆形衍射光栅的角度测量系统,对该系统的测量原理、测量过程、测量精度等进行了相应的设计、仿真与验证。设计与振镜同轴的反射镜,搭配反射式圆光栅以及光敏检测器件,利用反射式圆光栅产生的±1级衍射光干涉,把振镜转角位移量转化为干涉条纹光强的变化,以实现振镜转角的测量。实验结果表明:该测量系统能实现振镜±10°的角度测量,测量精度为10″。实现了振镜旋转角度的高精度测量,并且该装置结构紧凑,满足扫描振镜的小巧化设计需求。In order to achieve high-precision measurement of the rotation angle of the galvanometer,an angle detection system using a reflective diffraction grating is designed,and its measuring principle,measuring process and measuring precision are designed,simulated and verified.Through a mirror designed coaxially with the galvanometer,with a reflective circular grating and a photosensitive detection device,the±1st order diffracted light generated by the reflective circular grating is interfered to convert the angular displacement of the galvanometer into a change in the intensity of interference fringes.In this way,the measurement of the rotational angle of the galvanometer is realized.The experimental results show that the detection system can realize the measurement of the galvanometer’s angle within±10°,and the measurement accuracy is 10″.The high-precision measurement of the rotational angle of the galvanometer is realized,and the device has a compact structure to meet the requirements of the scanning galvanometer demand.

关 键 词：角度测量 反射式圆光栅 振镜转角 衍射光干涉 

分 类 号：O436.1[机械工程—光学工程] O713.1[理学—光学]