紧急停车系统在电子特种气体生产装置中的应用  

Design and application of ESD system in production device for electronic special gas

作　　者：孙珊珊 郑燕春 付铁柱 SUN Shanshan;ZHENG Yancun;FU Tiezhu(Quzhou Juhua Polyamide Fibre limited liability company,Quzhou,Zhejiang 324004;Zhejiang Britech Central Glass Co.,Ltd.,Quzhou,Zhejiang 324004)

机构地区：[1]衢州巨化锦纶有限责任公司 [2]浙江博瑞中硝科技有限公司,浙江衢州324004

出　　处：《化工生产与技术》2021年第2期37-39,I0005,共4页Chemical Production and Technology

摘　　要：根据紧急停车(ESD)系统的独立性和安全性的技术要求,结合某电子特种气体生产的特点,对高纯甲基硅烷的精馏装置的ESD系统进行了硬件配置及完善的逻辑设计。实际运行结果表明,不管是生产装置故障,还是系统本身故障,都能迅速响应,使生产装置达到设计的安全停车工况,满足了装置系统的独立性和SIL3安全综合等级要求,提高了系统的可靠性和稳定性,保障了装置生产的安全稳定。The ESD of high purity methylsilane distillation unit was configured and logical design improved according to technical requirement of ESD system and characteristic of electronic special gas production.The practical operation results indicated the improved system could response rapidly no matter production units malfunction or the system malfunction.This improved system met the requirements of independence and SIL3 safety level for improving reliability and stability of the system and ensured production process safety.

关 键 词：紧急停车(ESD)系统 安全 设计 电子特种气体 

分 类 号：TQ056.8[化学工程]