Correlation between pass-through flux of cobalt target and microstructure and magnetic properties of sputtered thin films  

作　　者：Xiu-Lan Xu Qian-Ming Huang Guo-Nan Feng Gang Han Qi-Xun Guo Xiao-Dong Xiong Xin He Jun-Feng Luo Rong-Ming Wang Chun Feng Guang-Hua Yu 

机构地区：[1]School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China [2]School of Mathematics and Physics,University of Science and Technology Beijing,Beijing 100083,China [3]Beijing Laboratory of Metallic Materials and Processing for Modern Transportation,University of Science and Technology Beijing,Beijing 100083,China [4]Grikin Advanced Materials Co.,Ltd,Beijing 102200,China

出　　处：《Rare Metals》2021年第4期975-980,共6页稀有金属（英文版）

基　　金：financially supported by the National Key R&D Program of China(No.2017YFB0305502);the National Natural Science Foundation of China(Nos.51571017,51671023,and 51871018);the Beijing Natural Science Foundation(No.2192031);the Key Science and Technology Projects of Beijing Education Committee(No.KZ201810011013);the Fundamental Research Funds for the Central Universities(No.FRF-TP-19-011B1)。

摘　　要：Cobalt thin films were deposited on silicon substrates by magnetron sputtering two commercial cobalt targets with different pass-through fluxes(PTFs).The influences of PTF on the magnetic properties of sputtered thin films were investigated.The results indicate that under the same sputtering conditions,cobalt thin film deposited by Co target with high PTF(84.21%) has lower remanence ratio(0.65),while cobalt thin film prepared by Co target with low PTF(69.13%) has higher remanence ratio(0.87).Through introducing an external magnetic field parallel to the film surface during sputtering processes,both the remanence ratios of cobalt thin films prepared by the two targets can be enhanced to approach 1.High-resolution transmission electron microscopy(HRTEM) images show that in the absence of the external magnetic field during sputtering,cobalt thin film deposited by the target with high PTF is randomly oriented in crystallographic orientations,which is due to that Co atoms have no enough time to migrate and diffuse on substrate and the atomic stacking is disordered.It is worth mentioning that crystallographic orientations of cobalt thin film deposited by target with low PTF are relatively consistent,resulting in relatively higher remanence ratio.In addition,HRTEM analysis indicates that the external magnetic field during sputtering drives the Co grains to arrange in a regular order with(002) orientation,leading to the improvement in remanence ratios.

关 键 词：Sputtering target Pass-through flux Thin film MICROSTRUCTURE 

分 类 号：O469[理学—凝聚态物理] TB383.2[理学—电子物理学]