Phase characterisation of metalenses  

作　　者：Maoxiong Zhao Mu Ku Chen Ze-Peng Zhuang Yiwen Zhang Ang Chen Qinmiao Chen Wenzhe Liu Jiajun Wang Ze-Ming Chen Bo Wang Xiaohan Liu Haiwei Yin Shumin Xiao Lei Shi Jian-Wen Dong Jian Zi Din Ping Tsai 

机构地区：[1]State Key Laboratory of Surface Physics,Key Laboratory of Micro-and Nano-Photonic Struaures(Ministry of Education)and Department of Physics,Fudan University,200433 Shanghai,China [2]Department of Electronic and Information Engineering,The Hong Kong Polytechnic University,999077 Hong Kong,China [3]School of Physics and State Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University,510275 Guangzhou,China [4]Shanghai Engineering Research Center of Optical Metrology for Nanofabrication(SERCOM),200433 Shanghai,China [5]State Key Laboratory on Tunable Laser Technology,Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System,Shenzhen Graduate School,Harbin Institute of Technology,518055 Shenzhen,China

出　　处：《Light(Science & Applications)》2021年第4期551-561,共11页光（科学与应用)（英文版）

基　　金：the China National Key Basic Research Program(2016YFA0301103,2016YFA0302000 and 2018YFA0306201);the National Science Foundation of China(11774063,11727811,91963212 and 62035016);the Science and Technology Com m ission of Shanghai Municipality(19XD1434600,2019SHZDZX01 and 19DZ2253000);the Guangzhou Science,Technology and Innovation Commission(201804020029);the Shenzhen Science and Technology Innovation Commission Grant(No.SGDX2019081623281169);the University Grants Committee/Research Grants Council of the Hong Kong Special Administrative Region,China(Project No.AOE/P-502/20);the Department of Science and Technology of Guangdong Province(2020B1515120073).

摘　　要：Metalenses have emerged as a new optical element or system in recent years,showing superior performance and abundant applications.However,the phase distribution of a metalens has not been measured directly up to now,hindering further quantitative evaluation of its performance.We have developed an interferometric imaging phase measurement system to measure the phase distribution of a metalens by taking only one photo of the interference pattern.Based on the measured phase distribution,we analyse the negative chromatic aberration effect of monochromatic metalenses and propose a feature size of metalenses.Different sensitivities of the phase response to wavelength between the Pancharatnam-Berry phase-based metalens and propagation phase-reliant metalens are directly observed in the experiment.Furthermore,through phase distribution analysis,it is found that the distance between the measured metalens and the brightest spot of focusing will deviate from the focal length when the metalens has a low nominal numerical aperture,even though the metalens is ideal without any fabrication error.We also use the measured phase distribution to quantitatively characterise the imaging performance of the metalens.Our phase measurement system will help not only designers optimise the designs of metalenses but also fabricants distinguish defects to improve the fabrication process,which will pave the way for metalenses in industrial applications.

关 键 词：CHARACTER DISTRIBUTION NOMINAL 

分 类 号：TG14[一般工业技术—材料科学与工程]