溶胶凝胶法制备疏水增透膜结构与性能研究  

RESEARCH ON STRUCTURE AND PROPERTIES OF HYDROPHOBIC ANTIREFLECTION COATINGS BY SOL-GEL METHOD

作　　者：谭皓文 米菁[1] 于庆河[1] 郝雷[1] Tan Haowen;Mi Jing;Yu Qinghe;Hao Lei(Department of Energy Materials and Technology,General Research Institute for Nonferrous Metals,Beijing 100088,China)

机构地区：[1]北京有色金属研究总院,能源材料与技术研究所,北京100088

出　　处：《太阳能学报》2021年第4期307-311,共5页Acta Energiae Solaris Sinica

基　　金：国家自然科学基金(51801178)。

摘　　要：将甲基三乙氧基硅烷(MTES)作为共前驱体制备SiO2溶胶,通过溶胶-凝胶(sol-gel)法制备SiO2增透膜,研究不同MTES添加量对增透膜性能的影响规律。结果表明,MTES的加入会向薄膜表面引入疏水基团达到疏水的效果,且随着MTES添加量的增加,薄膜表面水接触角大小先增加后减小,透过率呈现逐渐降低的趋势。在MTES与正硅酸乙酯(TEOS)物质的量之比为1∶2时接触角和透过率的综合性能最好,水接触角达到118°,全光谱范围内透过率达到95.95%。The SiO2 antireflection coatings was prepared by sol-gel method using methyltriethoxysilane(MTES)as a co-precursor.The effect of different MTES addition on the performance of antireflection coatings was studied.The results show that the addition of MTES will introduce hydrophobic groups to the coating surface to achieve the effect of hydrophobic.With the increase of the amount of MTES,the water contact angle of the film surface increases first and then decreases,and the light transmission shows the gradual decrease trend.When the molar ratio of MTES to tetraethyl orthosilicate(TEOS)is 1∶2,the combined performance of contact angle and light transmission is the best.The water contact angle reaches 118°,and the light transmission in the whole spectrum reaches 95.95%.

关 键 词：溶胶-凝胶法 增透膜 疏水性 透过率 甲基三乙氧基硅烷(MTES) 

分 类 号：TK513.1[动力工程及工程热物理—热能工程]