确定纳米压入面积函数的改进方法  

Improved Method for Determining Area Function of Nanoindentation

作　　者：李强[1] 任冬梅[1] 万宇[1] LI Qiang;REN Dongmei;WAN Yu(National Key Laboratory of Science and Technology on Metrology&Calibration,Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]航空工业北京长城计量测试技术研究所计量与校准技术重点实验室,北京100095

出　　处：《计测技术》2021年第2期87-90,共4页Metrology & Measurement Technology

基　　金：国家“十四五”技术基础科研项目(JSJL2019205C001)。

摘　　要：针对薄膜等微小结构材料力学性能测试面积函数测量问题,提出了一种改善微小压入深度下压头面积函数准确性的方法。该方法将压头与被测样品之间的投影接触面积与压头针尖曲率半径和角度相关联,解决常用的面积函数确定方法在50 nm以下浅压痕测量中不可靠的问题。经实验验证,该面积函数确定方法可以提高微小接触深度下压入硬度和折合模量的测量准确度。Aiming at the problem of area function measurement in the mechanical property test of thin-film and other micro-sized materials,a method to improve the accuracy of the indenter area function at small indentation depth is proposed.This method correlates the projected contact area between the indenter and the sample with the tip radius and angle of the indenter,which can improve the reliability of the commonly used area function determination method in the measurement of shallow indentation below 50 nm.The experimental results show that the measurement accuracy of indentation hardness and reduced modulus at a small contact depth can be improved by using this area function determination method.

关 键 词：面积函数 纳米压入 压头形状 压入硬度 测量 

分 类 号：TB9[一般工业技术—计量学]