基于Y型分支与布拉格光栅结构的集成光芯片研究  

Integrated Optical Chip Based on Y-branch and Bragg Grating Structure

作　　者：尹小杰 郑之远[3] 訾幸壮 晁明举 YIN Xiaojie;ZHENG Zhiyuan;ZI Xingzhuang;CHAO Mingju(School of Physics and Engineering,Zhengzhou University,Zhengzhou 450001,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Henan Key Laboratory of Optoelectronic Circuit and Integration,Henan Shi Jia Photons Technology Co.,Ltd,Hebi,Henan 458030,China)

机构地区：[1]郑州大学物理学院,郑州450001 [2]中国科学院半导体研究所集成光电子国家重点实验室,北京100083 [3]河南仕佳光子科技股份有限公司河南省光电芯片与集成重点实验室,河南鹤壁458030

出　　处：《光子学报》2021年第5期53-58,共6页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2019YFB2203004);河南省中国科学院科技成果转化项目(No.2019203)。

摘　　要：采用Y型分支与深刻蚀布拉格波导光栅相集成的方案,制备了带有通道监控功能的1×8光分路器集成芯片。耦合封装后的集成光芯片同时实现了稳定的通道光信号传输与监控功能。集成光芯片8通道反射谱中心波长范围为1 597 nm~1 639 nm,间隔为6 nm,3 dB带宽最大为0.67 nm,通道反射率最低为88.24%。1 550 nm波长下测试8通道的平均插损为11.92 dB,输出均匀性为0.19 dB。本文设计并制备的集成光芯片结构简单、集成化高,可以应用于光纤到户建设及其他光网络传输中,实现网络链路状态的实时监控。A 1×8 optical splitter integrated chip with channel monitoring function was fabricated by integrating Y-branch with deep etched Bragg grating structure.The integrated optical chip after coupling and packaging realizes stable optical signal transmission and monitoring function at the same time in the channel.The central wavelength range of 8-channel reflectance spectrum of the integrated optical chip is1597 nm~1639 nm,with an interval of 6 nm.The maximum of 3 dB bandwidth is 0.67 nm,and the minimum of channel reflectance is 88.24%.The average insertion loss of 8 channels is 11.92 dB and the output uniformity is 0.19 dB in the wavelength of 1550 nm.The integrated optical chip designed and fabricated in this study has simple structure and high integration,which can be widely used in the construction of fiber to home and other optical network transmission,and realize the function of real-time monitoring of network link status.

关 键 词：集成光芯片 Y型分支波导 布拉格波导光栅 光分路器 光纤到户 

分 类 号：TN2[电子电信—物理电子学]