基于磨砂玻璃压印的压阻式柔性压力传感器  

Piezoresistive Flexible Pressure Sensor Based on Frosted Glass Imprinting

作　　者：李明星 姚佳楠 刘江 李若舟 方玉明[1,2] LI Mingxing;YAO Jia'nan;LIU Jiang;LI Ruozhou;FANG Yuming(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Tele-communications,Nanjing,210023,CHN;National and Local Joint Engineering Laboratory of RF Integration and Micro-assembly Technology,Nanjing University of Posts and Telecommunications,Nanjing,210023,CHN)

机构地区：[1]电子与光学工程学院、微电子学院,南京邮电大学,南京210023 [2]射频集成与微组装技术国家地方联合工程实验室,南京邮电大学,南京210023

出　　处：《固体电子学研究与进展》2021年第2期154-159,共6页Research & Progress of SSE

基　　金：国家自然科学基金资助项目(60906009);江苏省研究生科研与实践创新计划项目(KYCX19_0968);射频集成与微组装技术国家地方联合工程实验室开放课题资助(项目号:KFJJ20180201);国家自然科学基金青年科学基金项目(61704090);江苏省自然科学基金青年项目(BK20170903)。

摘　　要：柔性压阻传感器结构简单、电阻变化范围宽、灵敏度高,在电子皮肤和医疗健康检测等领域受到广泛的关注和研究。使用不同目数的磨砂玻璃作为模具制备了具有微结构的多壁碳纳米管(MWCNT)/聚二甲基硅氧烷(PDMS)导电复合材料,并实现了微结构柔性压阻传感器。研究表明,目数最小(微结构尺寸为125μm)的磨砂玻璃制备的传感器具有最高灵敏度(7.4 kPa^(-1)),并且该传感器具有低于15%的迟滞性,13 ms的快速响应时间,低于90 Pa的低压检测能力以及在不同压力大小下稳定的输出响应。该方法制备的柔性传感器结构简单且成本低,具有较好的应用价值。Flexible piezoresistive sensors have received widespread attention and research in vari⁃ous fields such as electronic skin and medical health detection,due to its simple structure,wide resis⁃tance range,and high sensitivity.In this paper,frosted glasses with different meshes were used as molds to fabricate a micro-structured multi-walled carbon nanotube(MWCNT)/polydimethylsiloxane(PDMS)conductive composite material for microstructure based flexible piezoresistive sensors.Stud⁃ies have shown that the sensor made of ground glass with the smallest mesh(microstructure size of 125μm)has the highest sensitivity(7.4 kPa^(-1)),and the sensor demonstrates hysteresis of less than 15%,fast response time of 13 ms,low pressure detection capability below 90 Pa,and stable output response under different pressure levels.The flexible sensor prepared by the method has simple struc⁃ture and low cost,and has good application value.

关 键 词：柔性压阻传感器 导电复合材料 微结构 灵敏度 迟滞性 

分 类 号：TN402[电子电信—微电子学与固体电子学]