高精度绝对式差极角位移传感器  

High Precision Absolute Angular Displacement Sensor Employing Vernier-type Structure

作　　者：张辉 刘小康[2] 彭凯[2] 蒲红吉[2] 于治成[2] 徐天慧 ZHANG Hui;LIU Xiao-kang;PENG Kai;PU Hong-ji;YU Zhi-cheng;XU Tian-hui(Chengdu Jiujin Technology Co.,Ltd.,Chengdu 610000,China;Chongqing University of Technology,Chongqing 400054,China;Chongqing Aerospace Launch Vehicle Electronic Technology Co.,Ltd.,Chongqing 400039,China)

机构地区：[1]成都玖锦科技有限公司,四川成都610000 [2]重庆理工大学,重庆400054 [3]重庆航天火箭电子技术有限公司,重庆400039

出　　处：《仪表技术与传感器》2021年第5期27-33,共7页Instrument Technique and Sensor

摘　　要：针对传统的大尺寸栅式角位移传感器在实现绝对定位的同时难以兼顾高精度测量的问题,在前期研究基础上设计了基于交变电场的大尺寸绝对式角位移传感器。传感器利用单列式传感结构实现高精度测量,设计内、外圈两圈结构在整周内刚好相差一对极以实现绝对定位。研制的传感器样机内径为100 mm、外径为154 mm,经实验测试并分析,其对极内呈现的二次谐波误差是由传感器不圆度所导致,四次谐波误差是因传感器结构缝宽比设计不合理而形成。为此,通过加长定尺极片、缩短动尺极片以削弱二次谐波误差,并设计缝宽比为1∶1以减小四次误差。优化后的传感器整周测量精度达到5″,对极内测量精度达到±1.5″。To solve the problem that the traditional large-size grating-type angular displacement sensor can not only realize absolute positioning but also take into account high-precision measurement,a large-size absolute angular displacement sensor with vernier-type structure based on alternating electric field was proposed based on previous study in this paper.The sensor used a single-row sensing structure to achieve high-precision measurement,and the inner and outer structure were designed to be exactly one period over the whole period that employed to obtain absolute positioning information.A prototype of sensor with inner diameter of 100 mm and outer diameter of 154 mm was fabricated,experimented and analyzed.The second harmonic error over a single period was caused by non-roundness of sensor,and the fourth harmonic error resulted from unreasonable design of sensor with the ratio of the interval width to electrode width(slit width ratio).In order to weaken the second harmonic error,lengthen stator electrode and shorten the rotor electrode were adopted,and the ratio of electrode width to the interval width was designed to be 1∶1 to reduce the fourth error.After optimization,its measurement error achieves 5″over the whole period and±1.5″over a small period.

关 键 词：高精度 绝对式 差极结构 角位移传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]