一种用于OLED屏疵病检测的高解析度线扫描镜头设计  

Lens design of high resolution line scan for oled screen defect detection

作　　者：曹卫卫 孙逊 安双新 武斌 谢廷安 CAO Weiwei;SUN Xun;AN Shuangxin;WU Bin;Xie Tingan(Optical Navigation and Detection Division,Shanghai Academy of Spaceflight Technology Institute,Shanghai 201109,China;CollegeFlight Control Technology Department,Shanghai Academy of Spaceflight Technology Institute,Shanghai 201109,China)

机构地区：[1]上海航天控制技术研究所光学导航与探测事业部,上海201109 [2]上海航天控制技术研究所飞行控制技术部,上海201109

出　　处：《光学技术》2021年第2期163-166,共4页Optical Technique

摘　　要：为了满足OLED屏疵病检测的成像需求,设计了一种高解析度线阵扫描镜头。光学系统基于双高斯对称结构,镜头焦距f′=116mm、放大倍率β=-0.5^(×)、物方数值孔径NA=0.038、物方线视场2y=120mm。利用光学设计软件Zemax仿真可得镜头的调制传递函数MTF在奈奎斯特频率120lp/mm时能达到0.2以上,接近衍射极限;各视场点列图基本都在艾里斑之内,均方根半径较小;利用双高斯的对称特性降低畸变,相对畸变q<0.5%。针对景深和曝光量可调的成像需求,即F#的切换需求,以及光学元件的尺寸排布,给出了光阑孔径可变的镜头光机结构设计。最终利用MTF测试仪对镜头的成像质量进行检测,实验结果表明此镜头能够满足OLED屏疵病检测功能的工业成像需求。In order to meet the imaging requirements of OLED defect monitoring,a linear scanning lens of high-resolution is designed.The optical system is designed on the basis of double Gauss optical structure,the focal length of the lens is 116 mm,the magnification is 0.5,the object side numerical aperture is 0.038 and the linear object field of view is120 mm.The modulation transfer function(MTF)of the len can reach more than 0.2 at Nyquist frequency of 100 lpmm which can be obtained by Zemax simulation,and the diffraction limit can be reached.All the field of view points are basically within the Airy patch,and the RMS radius is small.The symmetry characteristic of double gauss is used to reduce the distortion,and the relative distortion is less than 0.5%.According to imaging requirements for adjustable depth of field and exposure(that is the switching requirements of F#)and structural arrangement of optical components,the opto-mechanical structure design with variable aperture diaphragmof lensis provide.Finally,the imaging quality of the lensis detected by MTF tester.The experimental results show that thelens can meet the industrial imaging needs of OLED screen defect detection function.

关 键 词：光学设计 扫描镜头 双高斯 光机结构设计 

分 类 号：O439[机械工程—光学工程]