硅烷类电子化学品研究进展  

Research Progress of Silane Electronic Chemicals

作　　者：刘阳[1,2] 苏腾 董红 瞿志荣[1,2] 伍川 LIU Yang;SU Teng;DONG Hong;QU Zhi-rong;WU Chuan(Key Laboratory of Organosilicon Chemistry and Material Technology of Ministry of Education,Hangzhou Normal University,Hangzhou,Zhejiang 311121,China;Collaborative Innovation Center for the Manufacture of Fluorine and Silicone Fine Chemicals and Materials,Hangzhou,Zhejiang 311121,China)

机构地区：[1]杭州师范大学有机硅化学及材料技术教育部重点实验室,浙江杭州311121 [2]氟硅精细化学品与材料制造协同创新中心,浙江杭州311121

出　　处：《浙江化工》2021年第5期23-27,共5页Zhejiang Chemical Industry

基　　金：浙江省公益计划资助项目(LGG20B040003)。

摘　　要：硅烷类电子化学品是芯片制造、芯片封装及大规模集成电路等高端元器件和设备制造的关键原材料。综述了氯硅烷、硅烷、含N的硅烷及乙烯基硅烷等电子化学品的研究进展,并对硅烷类电子化学品未来发展趋势进行了展望。Silane electronic chemicals are key raw materials for the manufacture of high-end components and equipment such as chip manufacturing,chip packaging and large-scale integrated circuits.The research progress of electronic chemicals such as chlorosilanes,silanes,N-containing silanes and vinyl silanes are reviewed,and the future development trends of silane electronic chemicals are prospected.

关 键 词：电子化学品 氯硅烷 硅烷 含N硅烷 乙烯基硅烷 

分 类 号：TN04[电子电信—物理电子学] TQ264.1[化学工程—有机化工]