伪火花放电的物理机制与应用综述  

Review on Physical Mechanisms and Applications of Pseudospark Discharge

作　　者：闫家启 申赛康 孙国祥 丁卫东[1] Yan Jiaqi;Shen Saikang;Sun Guoxiang;Ding Weidong(State Key Laboratory of Electrical Insulation and Power Equipment Xi’an Jiaotong University,Xi’an 710049 China)

机构地区：[1]电力设备电气绝缘国家重点实验室(西安交通大学),西安710049

出　　处：《电工技术学报》2021年第11期2408-2423,共16页Transactions of China Electrotechnical Society

基　　金：国家自然科学基金面上项目资助(51777163)。

摘　　要：伪火花放电是一种工作于巴申曲线左半支、引燃于空心阴极结构、具有弥散的主放电通道的特殊低气压放电,在脉冲功率和等离子体等领域得到广泛应用。该文综述了近年来有关伪火花放电物理机制和典型应用的研究。首先分析伪火花放电主要过程的典型特征、微观机制和影响因素,依次为预放电、空心阴极放电、超密集辉光放电和真空电弧放电四个阶段;其次讨论当前伪火花放电研究中仍存在的问题,如电流淬灭和阻抗波动等;然后介绍伪火花放电的典型应用,包括伪火花开关、电子束源、极紫外光源等,并着重介绍相关装置的参数水平和技术特点;最后探讨伪火花放电研究今后的发展趋势。Pseudospark discharge is a special type of low-pressure gas discharge,which works at the left hand of Paschen’s curve,ignites from the hollow cathode,and has a homogeneous discharge channel.It is widely used in the fields of pulsed power technology and plasma driving.This paper reviews the researches on physical mechanisms and typical applications of pseudospark discharge in recent years.Firstly,mechanisms and characteristics of sub-phases of pseudospark discharge are analyzed,which are predischarge,hollow cathode discharge,superdense glow discharge,and vacuum arc discharge;secondly,remained problems in pseudospark discharge are analyzed,such as current quenching and impedance fluctuations;thirdly,typical applications of pseudospark discharge are introduced,including pseudospark switch,electron beam sources,extreme ultraviolet light sources,etc.,with emphasis on the key parameters and technical characteristics of these devices.Finally,the future research topics are discussed.

关 键 词：伪火花放电 物理机制 伪火花开关 电子束源 极紫外光源 

分 类 号：TM89[电气工程—高电压与绝缘技术]