高纯稀土钇靶材焊接技术  

Bonding technology of high purity yttrium target

作　　者：徐国进 张巧霞 罗俊锋 李勇军 滕海涛 熊晓东 Xu Guojin;Zhang Qiaoxia;Luo Junfeng;Li Yongjun;Teng Haitao;Xiong Xiaodong(GRIKIN Advanced Materials Co.,Ltd.,Beijing 102200,China;The High Purity Metal Sputtering Target Engineering Technology Research Center in Beijing,Beijing 102200,China)

机构地区：[1]有研亿金新材料有限公司,北京102200 [2]北京市高纯金属溅射靶材工程技术研究中心,北京102200

出　　处：《焊接》2021年第3期35-38,63,共5页Welding & Joining

基　　金：国家重点研发计划项目(2017YFB0405901)。

摘　　要：以高纯稀土钇材料、铜及6061Al合金材料为研究对象,研究了高纯稀土钇靶材的钎焊与扩散焊接性能。结果表明,稀土钇靶材对In焊料的浸润性差,需要对靶材进行金属化处理,提高靶材的焊接性能;研究不同钎焊焊接温度对稀土钇靶材焊接质量的影响,焊接温度越高靶材焊合率越高,与焊料的流动性提高有关;开展高纯稀土钇靶材与6061Al合金的扩散焊接技术研究,在焊接温度400℃,压力110 MPa,保温3 h的扩散焊接后,扩散区深度约为8μm,焊接界面实现冶金结合,焊接强度达到70 MPa,满足8~12英寸大尺寸靶材的高溅射功率要求。Taking high purity rare earth yttrium materials,copper and 6061Al alloy materials as study objects,the soldering and diffusion welding properties of high purity rare earth yttrium targets were studied.The results indicated that the wettability of rare earth yttrium targets to In solder was poor,so it was necessary to metalize the target material to improve its soldering performance.The influence of soldering temperatures on the welding quality of rare earth yttrium targets was studied.The higher the soldering temperature was,the higher the soldering rate of targets was,which was related to the improvement of solder fluidity.The diffusion welding technology of high purity rare-earth yttrium targets and 6061Al alloy was studied.After the diffusion welding at 400℃welding temperature,110 MPa welding pressure and 3 h holding time,the diffusion depth was about 8μm,and the welding interface was metallurgical bonding.The welding strength was up to 70 MPa,which met the high sputtering power requirements of the large size targets of 8~12 inches.

关 键 词：靶材 高纯稀土钇 6061Al合金 钎焊 扩散焊接 

分 类 号：TG453.9[金属学及工艺—焊接]