Modelling of electronegative collisional warm plasma for plasma-surface interaction process  

作　　者：Rajat DHAWAN Hitendra K MALIK 

机构地区：[1]Plasma Science and Technology Laboratory,Department of Physics,Indian Institute of Technology Delhi,New Delhi—110016,India

出　　处：《Plasma Science and Technology》2021年第4期48-54,共7页等离子体科学和技术（英文版）

基　　金：Rajat Dhawan acknowledges the Council of Scientific and Industrial Research(CSIR),Government of India for providing financial support(Grant Reference Number:09/086(1289)/2017-EMR-1).

摘　　要：An electronegative collisional plasma having warm and massive positive ions,non-extensive distributed electrons and Boltzmann distributed negative ions is modelled for the plasma-surface interaction process that is used for the surface nitriding.Specifically the sheath formation is evaluated through the Bohm’s criterion,which is found to be modified,and the variation of the sheath thickness and profiles of the density of plasma species and the net space charge density in the sheath region in addition to the electric potential.The effect of ion temperature,nonextensivity and collisional parameter is examined in greater detail considering the collisional cross-section to obey power-law dependency on the positive ion velocity.The positive ions are found to enter in the sheath region at lower velocities in the collisional plasma compared to the case of collision-less plasma;this velocity sees minuscule reduction with increasing nonextensivity.The increasing ion temperature and collisional parameter lead to the formation of sheath with smaller thickness.

关 键 词：electronegative sheath ion temperature non-extensivity sheath thickness power-law dependency COLLISIONS 

分 类 号：O53[理学—等离子体物理]