半导体行业磷酸废液提纯处理方案对比分析  

Comparative analysis of purification treatment schemes of phosphoric acid waste liquid in semiconductor industry

作　　者：李朋 LI Peng(China Electronics Innovation Environmental Technology Co.,Ltd.,Wuxi 212000,China)

机构地区：[1]江苏中电创新环境科技有限公司,江苏无锡212000

出　　处：《再生资源与循环经济》2021年第5期38-40,共3页Recyclable Resources and Circular Economy

摘　　要：随着我国半导体行业的快速发展,半导体制程过程中产生大量含杂质磷酸废液。综合对比分析了4种含杂质磷酸废液的提纯处理技术方案。涉及到的技术单元系统包括化学反应处理系统、TMF管式微滤膜系统、蒸发器系统、阴阳离子树脂交换系统。采用各工艺组合处理的方法,对4种系统进行分析对比。为后续磷酸废液提纯处理生产技术提供参考。With the rapid development of the semiconductor industry,a large amount of phosphoric acid waste liquid containing impurities was produced during the production process.This work comprehensively compared and analyzed four technical solutions for purification and treatment of phosphoric acid waste liquid containing impurities.The technical unit systems involved include chemical reaction treatment system,TMF tubular microfiltration membrane system,evaporator system,Anion and cation resin exchange system.The four systems were analyzed and compared the combined processing method of each process.This study provided technical reference for the subsequent purification and treatment of phosphoric acid waste liquid production.

关 键 词：磷酸废液 TMF管式微滤膜 蒸发器系统 离子交换 

分 类 号：X703[环境科学与工程—环境工程]