二氧化硅平面光波导器件的研究进展  

Recent Progresses about Silica-based Planar Lightwave Circuit Devices

作　　者：杨斌[1] 尹小杰[2] 李绍洋 吴远大[2,3,4] YANG Bin;YIN Xiaojie;LI Shaoyang;WU Yuanda(High-tech Research and Development Center,Ministry of Science and Technol.,Beijing 100044,CHN;State Key Lab.of Integrated Optoelectronics,Institute of Semiconductors of Chinese Academy of Sciences,Beijing 100083,CHN;College of Materials Science and Opto-Electronic Technol.,University of Chinese Academy of Sciences,Beijing 100049,CHN;Center of Materials Science and Optoelectronics Engin.,University of Chinese Academy of Sciences.Beijing 100049,CHN)

机构地区：[1]科技部高技术中心材料处,北京100044 [2]中国科学院半导体研究所,集成光电子学国家重点联合实验室,北京100083 [3]中国科学院大学,材料科学与光电技术学院,北京100049 [4]中国科学院大学材料与光电研究中心,北京100049

出　　处：《半导体光电》2021年第2期151-157,167,共8页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2016YFB0402500)。

摘　　要：二氧化硅平面光波导(PLC)器件以其低损耗、高工艺容差,以及与CMOS工艺兼容和与单模光纤模场匹配良好等优点,在光通信、光互连和集成光学中得到了广泛的应用。文章综述了二氧化硅平面光波导器件及其应用的进展,重点针对分束器、阵列波导光栅、可调光衰减器及其集成器件的最新研究进行了介绍,对未来发展趋势进行了展望。Owing to their advantages such as low loss,high process tolerance,manufacturing process compatible with CMOS processes and good mode field matching with single-mode optical fiber,silica-based planar light-wave circuits(PLC)have been widely used in optical communication,optical interconnections and integrated optics.In this paper,the recent progresses of the silica-based PLC devices and their applications are reviewed.Silica-based PLC devices including beam splitters,array waveguide gratings,variable optical attenuator and their integration devices are described,and future development trends are proposed.

关 键 词：有源光子集成波导器件 无源光子集成波导器件 集成光学 光通信系统 

分 类 号：TN252[电子电信—物理电子学]