基于S型Y分支波导的石墨烯M-Z电光调制器设计  

Design of Graphene M-Z Electro-optic Modulator Based on S-Y Branch Waveguide

作　　者：周勇 陆荣国 吕江泊 沈黎明 林瑞 刘永 ZHOU Yong;LU Rongguo;LV Jiangbo;SHEN Liming;LIN Rui;LIU Yong(School of Optoelectronic Science and Engin.,University of Electronic Science and Technol.of China,Chengdu 611731,CHN)

机构地区：[1]电子科技大学光电科学与工程学院,成都611731

出　　处：《半导体光电》2021年第2期179-184,共6页Semiconductor Optoelectronics

基　　金：国家重点研究发展计划项目(2019YFB2203800);四川省科学技术计划项目(2020YFH0108);中央高校科研业务费项目(ZYGX2019J046)。

摘　　要：利用COMSOL软件设计了一种基于S型Y分支SOI脊波导的石墨烯M-Z电光调制器,并对Y分支波导曲率半径、相位臂长度、芯层间距和输入输出直波导长度等结构参数对调制器的影响进行了分析。在此基础上对电光调制器的性能指标进行了计算和优化,最终设计出了3dB带宽为143GHz、消光比为15.05dB的硅基石墨烯M-Z电光调制器。In this paper,agraphene M-Z electro-optical modulator based on S-Y branch SOI ridge waveguide was designed by COMSOL,and the influence of the Y-branch waveguide curvature radius,the length of the phase arm,core spacing and input-output straight waveguide length on the modulator were analyzed.On this basis,the performance index of the electrooptical modulator was calculated and optimized.Finally,a silicon graphene M-Z electro-optical modulator with a 3 dB bandwidth of 143 GHz and an extinction ratio of 15.05 dB was designed.

关 键 词：石墨烯 M-Z电光调制器 S型Y分支波导 绝缘体上硅脊形波导 

分 类 号：TN252[电子电信—物理电子学] TN256