一种适用于电子气工厂的新型制氮机工艺研究  

Study on A New Type of Nitrogen Generator Process Suitable for Electronic Gas Factory

作　　者：邓韬 王开兵 钟小禹 刘巍 王君 全诗林 DENG Tao;WANG Kai-bing;ZHONG Xiao-yu;LIU Wei;WANG Jun;QUAN Shi-lin(Guangzhou Guanggang Gases&Energy Co.,Ltd.,Guangdong Guangzhou 511458,China)

机构地区：[1]广州广钢气体能源股份有限公司,广东广州511458

出　　处：《广州化工》2021年第11期115-117,共3页GuangZhou Chemical Industry

摘　　要：目前,随着电子气行业对氮气的性能要求越来越严苛,需要氮气设备具有包括氮气供应连续性、氮气供应可靠性及氮气产品杂质含量等要求。现有的制氮机往往很难全方位满足电子气供气要求,本文主要论述了一种适用于电子气工厂的新型制氮机,具有宽泛的负荷调节范围,可节约能耗,可保证氮气供应的连续性及可靠性,且无需增设纯化器即可保证氮气产品纯度,关键设备一用一备,可避免设备宕机对制氮供气的影响,保证供气系统的可持续性。As the electronic gas industry has more and more stringent performance requirements for nitrogen,nitrogen equipment is required to have performance including nitrogen supply sustainability,nitrogen supply reliability and nitrogen product impurity content.Existing nitrogen generators are often difficult to meet the requirements of electronic gas supply in all aspects.A new type of nitrogen generator suitable for electronic gas factories was discussed.It had a wide load adjustment range,which can save energy and ensure nitrogen.The continuity and reliability of the supply,and the purity of nitrogen products can be guaranteed without additional purifiers.The key equipment was used and one was prepared to avoid the impact of equipment downtime on the nitrogen production and gas supply,and ensure the sustainability of the gas supply system.

关 键 词：制氮机 氧氮精馏 可持续供气 

分 类 号：TQ914.1[化学工程]