透射电子显微镜可控气氛原位样品杆气体密封性能分析  

Analysis of Gas Sealing Performance on Controlled Atmosphere In-situ Holder under Transmission Electron Microscope

作　　者：王冬[1] 张振宇[2] 王林海 孟凡宁 刘冬冬 Wang Dong;Zhang Zhenyu;Wang Linhai;Meng Fanning;Liu Dongdong(China Academy of Space Technology,Beijing Satellite Manufacturing Co.,Ltd.Beijing,100080;Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,School of Mechanical Engineering,Dalian University of Technology,Dalian Liaoning 116024,China)

机构地区：[1]中国空间技术研究院北京卫星制造厂有限公司,北京100080 [2]大连理工大学机械工程学院,精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《硬质合金》2021年第2期141-147,共7页Cemented Carbides

基　　金：国家自然科学基金优秀青年基金《超精密加工工艺与装备》(51422502)。

摘　　要：面向国内高端科研仪器设备研发需求,针对现有透射电子显微镜样品杆不能够传递易氧化、易潮解、易污染样品的难题,设计了一种可控气氛原位样品杆。为保证原位样品杆气氛可控的稳定性,建立了负压条件下的无润滑半接触式端面O圈密封和内部旋转O圈密封有限元模型,分析密封结构的可靠性,并进行了实验验证。结果表明:采用本文中可控气氛原位样品杆密封结构设计,真空密封时间超过1 h以上,能够满足设计要求。有限元模型计算泄漏率与实际实验测得泄漏率一致性良好,有限元模型可靠。For the development demands of domestic high-tech scientific instruments, a controllable atmosphere in-situ holder for Transmission Electron Microscope(TEM) is designed. This holder is invented to solve the problem that the existing transmission electron microscope holders cannot transmit samples which are easily oxidized, easily deliquescence, and easily contaminated. To ensure the controllable stability of atmosphere inside the in-situ holder, a non-lubricated semi-contact end face O-ring seal and an internal rotating O-ring seal finite element model under negative pressure are established to analyze the stable and reliable of seal structure, and the experimental verification was carried out. The results show that: Using the controllable atmosphere in-situ holder sealing structure designed in this article, vacuum sealing more than 1 hour, which can meet the design requirements. The leakage rate calculated by the finite element model is in good agreement with the leakage rate measured by actual experiment, which confirms the reliability of the finite element model.

关 键 词：透射电子显微镜 样品杆 结构设计 干气密封 有限元分析 

分 类 号：TN16[电子电信—物理电子学]