3英寸氧化镁基底上沉积DyBCO高温超导薄膜  

Deposition of high temperature superconducting DyBCO thin film on 3 inch MgO substrate

作　　者：孙延东 王朗 马丽媛 季来运 Sun Yandong;Wang Lang;Ma Liyuan;Ji Laiyun(Tianjin Hi-tech Superconducting Electronic Technology Co.Ltd.,Tianjin 300384,China;Tianjin Normal University,Tianjin 300387,China)

机构地区：[1]天津海泰超导电子有限公司,天津300384 [2]天津师范大学,天津300387

出　　处：《低温与超导》2021年第5期41-44,53,共5页Cryogenics and Superconductivity

摘　　要：采用多源共蒸发技术在3英寸氧化镁基底上沉积了具有优异性能的DyBCO高温超导薄膜。用台阶仪对薄膜的厚度进行测量,结果显示超导薄膜厚度在650 nm左右。在77 K的液氮中,对薄膜的临界电流密度Jc进行测量,薄膜表面的临界电流密度Jc都大于2.4 MA/cm2,且均匀性良好。High temperature superconducting DyBCO thin film with excellent properties was deposited on 3 inch MgO substrates. The thickness of the thin film was measured to be 650 nm. The critical current density(Jc) of the film was measured at 77 K of liquid nitrogen. The values of Jc on the film is over 2.4 MA/cm2.

关 键 词：多源共蒸发 3英寸氧化镁 高温超导薄膜 DyBCO 

分 类 号：O511.3[一般工业技术—材料科学与工程]