图形化FeNi纳米颗粒薄膜制备与性能研究  

Preparation and properties of patterned FeNi nanoparticle films

作　　者：欧修龙 熊仙 王迪 王绍明 OU Xiulong;XIONG Xian;WANG Di;WANG Shaoming(Center for Research on the Preparation and Properties of New Functional Materials,Hanjiang Normal University,Shiyan 442000,China)

机构地区：[1]汉江师范学院新型功能材料制备与物性研究中心,湖北十堰442000

出　　处：《兵器材料科学与工程》2021年第3期88-93,共6页Ordnance Material Science and Engineering

基　　金：湖北省自然科学基金(2019CFB777);国家级大学生创新创业训练计划项目(20190518002X,20190518003X);湖北省高等学校优秀中青年科技创新团队计划项目(T2020024)。

摘　　要：采用电场辅助沉积技术和光刻剥离工艺,在5~40 kV沉积电场作用下,以Si(100)为衬底,制备一系列条纹宽度为40μm的Fe50Ni50纳米颗粒薄膜材料。采用XRD、SEM、AFM及VSM等测试方法,研究薄膜结构、形貌和磁性能;用单端口短路微带线法对其微波性能进行表征。结果表明:增加沉积电场大小,可方便、有效实现条纹结构Fe50Ni50纳米颗粒薄膜饱和磁化强度MS和面内单轴磁各向异性场Hk值同时提高,使薄膜铁磁共振频率向更高频段移动。Conventional ultra-violet photolithography and lift-off methods were adopted to prepare strip-patterned films with strip width of 40 μm on Si(100)substrates. The patterned FeNi nanoparticle films were prepared by electric field-assisted deposition technique with the electric field 5-40 kV. The structure and magnetic properties of the films were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM),atomic force microscope(AFM)and vibrating sample magnetometer(VSM). The microwave permeability spectra were measured by a shorted micro-strip transmission line perturbation method. The results show that the application of electric field is very effective to improve the in-plane magnetic anisotropy field and saturation magnetization simultaneously for strip-patterned films,equipping them with the higher ferromagnetic resonance frequency.

关 键 词：软磁薄膜 磁性能 电场辅助沉积 面内单轴磁各向异性 

分 类 号：TB34[一般工业技术—材料科学与工程]