偏振无关多模干涉型1×3光功分器的设计  

Design of Polarization-Insensitive Multimode Interference 1×3 Optical Power Splitter

作　　者：汪静丽[1] 皇甫利国 陈鹤鸣 Wang Jingli;Huangfu Liguo;Chen Heming(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing,Jiangsu 210023,China;Bell Honors School,Nanjing University of Posts and Telecommunications,Nanjing,Jiangsu 210023,China)

机构地区：[1]南京邮电大学电子与光学工程学院,微电子学院,江苏南京210023 [2]南京邮电大学贝尔英才学院,江苏南京210023

出　　处：《光学学报》2021年第7期87-94,共8页Acta Optica Sinica

基　　金：国家自然科学基金(61571237);江苏省自然科学基金(BK20151509);南京邮电大学校级科研基金(NY217047)。

摘　　要：设计具有宽带性能的偏振无关1×3光功分器,采用离子辅助沉积方法调节三明治结构芯层SiNx的折射率,使得正交偏振模的拍长相等而实现偏振无关;梯形多模干涉波导与锥形波导的组合可实现器件宽带宽、低损耗及良好的分光均匀性。运用有限时域差分法进行建模仿真及参数优化,结果表明:器件的多模干涉波导长度仅为13.2μm,附加损耗低于0.07 dB,不均匀度低于0.03 dB,0.5 dB带宽高达255 nm,可覆盖S、C、L、U以及部分E波段,在未来集成光学系统中具有较高的应用价值。We proposed a polarization-insensitive 1×3 optical power splitter with broadband performance.Ion assisted deposition was used to change the refractive index of the core SiNx in a sandwiched structure,so that the beat lengths of the orthogonal polarization modes were equal and thus polarization insensitivity was achieved.A combined structure of trapezoidal multimode interference waveguide and tapered waveguide was introduced to realize broad bandwidth,low loss,and good beam splitting uniformity.Furthermore,a finite-difference time-domain method was applied to simulation and optimization,and the results demonstrate that the length of the multimode interference waveguide is only 13.2μm;the excess loss and imbalance of the splitter are lower than 0.07 dB and 0.03 dB,respectively.In addition,the 0.5 dB-loss bandwidth is as high as 255 nm,which can cover S,C,L,U,and part of E bands.Therefore,the proposed splitter has potential application value in the future integrated optical systems.

关 键 词：集成光学 多模干涉 偏振无关 三明治结构 

分 类 号：TN256[电子电信—物理电子学]