双波长干涉技术中改进的最小公倍数有效波长法  

Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry

作　　者：郭小庭 刘晓军[1] 雷自力[1] 杨文军 徐龙[1] Guo Xiaoting;Liu Xiaojun;Lei Zili;Yang Wenjun;Xu Long(School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan,Hubei 430074,China)

机构地区：[1]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《激光与光电子学进展》2021年第7期189-195,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51475192,51905200,51975233)。

摘　　要：在双波长干涉仪中,传统的等效波长法只是利用了单波长包裹相位之间的差值信息,忽略了它们的大小和正负信息。基于最小公倍数的有效波长法直接利用多个单波长包裹相位信息,可以实现比传统等效波长方法更大的无模糊测量范围,且没有误差放大效应。然而已有的最小公倍数有效波长解相位算法主要基于查表法,速度较慢,不适用于实际测量。提出了一种新的算法,可大幅提高最小公倍数有效波长法的计算速度,该方法可应用于双波长或多波长干涉仪中。In the dual-wavelength interferometer,the traditional equivalent wavelength method only uses the difference information between two single wavelength wrapped phases,and ignores their size as well as positive and negative information.The effective wavelength method based on the least common multiple directly uses the wrapped phase information of multiple single wavelengths,and thus not only it can achieve a larger unambiguous measurement range than the traditional equivalent wavelength method,but also it has no error amplification effect.However,the existing least common multiple effective wavelength phase unwrapping algorithm is mainly based on the look-up table method,which is slow and not suitable for a practical measurement.In this paper,a new algorithm is proposed,which can greatly improve the calculation speed of the least common effective wavelength method,so that it can be applied in dual-wavelength or multi-wavelength interferometers.

关 键 词：测量 表面测量 双波长干涉仪 等效波长 最小公倍数 无模糊测量范围 

分 类 号：O436[机械工程—光学工程]