铜微纳结构的激光直写及其应用研究进展  

Direct Laser Writing of Micro/Nano Copper Structures and Their Applications

作　　者：周兴汶 廖嘉宁 姚煜 康慧[1] 郭伟[1] 彭鹏[1] Zhou Xingwen;Liao Jianing;Yao Yu;Kang Hui;Guo Wei;Peng Peng(School of Mechanical Engineering&Automation,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学机械工程及自动化学院,北京100191

出　　处：《中国激光》2021年第8期135-147,共13页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1104900);国家自然科学基金(51975033);北京市自然科学基金(3192020)。

摘　　要：电性能优良且成本低廉的铜微纳结构在柔性电子领域中展现出广阔的应用前景。激光直写因其快速灵活且可控性高等优势,成为铜微纳结构的高效加工方法之一。概述了微纳结构激光加工的技术特点,随后针对激光直写铜微纳结构展开论述。重点分析了前驱体成分及激光工艺参数对铜微/纳观结构及电性能的影响,探讨了激光直写在铜微纳结构可控制备中的优势。列举了所得结构在柔性电子器件制造中的典型应用场景,分析了典型器件的工作机理。此外,对激光直写微纳结构的未来发展趋势进行了展望。Significance Owing to excellent adaptability to different working conditions,flexible electronics have attracted significant attention in many fields,such as wireless communication,human-machine interaction,and personal healthcare.Functional parts and conductive circuits are the basic components of electronics that respond to external stimulus and conduct signals,respectively.Nanomaterials with unique physical and chemical properties are widely used for developing flexible electronics.Noble metals,such as silver,gold,and platinum are good candidates for manufacturing conductive parts because of their high conductivity and chemical stability.However,the high price of these metals limits their large scale production.Recently,copper has been considered a good alternative to noble metals for developing conductive component owing to its low-cost and excellent electrical properties.Furthermore,copper oxides(cuprous oxide and cupric oxide)are important transition metal oxides because of their semiconductive properties.They have been widely used as functional parts owing to their high sensitivity for external stimulation,such as humidity,temperature.Efficient manufacturing methods for materials play a major role in developing high-performance devices.The typical“bottom-up”process,such as hydrothermal and chemical precipitation,provides a low-cost,precise control,and large-scale synthesis route to manufacture the micro/nanostructured copper.However,post-treatment processes,such as printing and sintering,are required to obtain the desired properties in a device.Such step-by-step manufacturing requires the cooperation of various techniques,which increases the process cost and complexity.Thus,developing a low-cost process for manufacturing the micro/nanostructures has attracted significant attention.Direct laser writing,as an advanced processing technology developed recently,provides a novel approach for micro/nanostructure manufacturing.This technology has been used to process the structure,including noble metals,metal

关 键 词：激光制造 激光材料加工 纳米材料 纳连接 柔性电极 

分 类 号：TN249[电子电信—物理电子学]