超快激光微孔加工工艺研究进展  

Research Progresses of Process Technology in Ultrafast Laser Micro-Hole Drilling

作　　者：阿占文 吴影 肖宇 耿瑞琨 邹贵生[1] A Zhanwen;Wu Ying;Xiao Yu;Geng Ruikun;Zou Guisheng(Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China;School of Mechanical Engineering,Qinghai University,Xining,Qinghai 810016,China)

机构地区：[1]清华大学机械工程系,北京100084 [2]青海大学机械工程学院,青海西宁810016

出　　处：《中国激光》2021年第8期148-160,共13页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1104900);国家自然科学基金(51775299,52075287,51520105007)。

摘　　要：硬脆和复杂结构材料上的微孔加工是超快激光的主要应用之一。超快激光微孔加工的质量和加工效率受单脉冲能量、频率、脉宽、偏振等光束特性以及加工方式、被加工材料、辅助方式等多个因素的综合影响。不同的工艺参数组合将导致不同的孔圆度、孔锥度、加工缺陷以及侧壁和孔边缘的表面质量,对工艺参数进行研究是超快激光微孔加工的核心问题之一。本文从光束特性、加工及辅助方式、材料特性等方面综述了目前超快激光微孔加工工艺的研究进展,总结并对比了不同研究中对同一工艺参数的研究结果。最后,提出了目前研究存在的不足并展望了今后提升效率和加工质量的方向。Significance Micro-holes with a diameter of tens to few hundreds of microns are widely used in different industrial fields,such as injection nozzles in the automotive industry,cooling holes in jet engine components,and interconnecting micro-via in electronic packages.Methods,such as electro discharge,mechanical,electrochemical,and continuous or pulsed laser drilling,are used for micro-hole machining.However,these methods cannot be used in the micro-hole drilling with a diameter smaller than 100μm.For micro-holes larger than this size,these methods have their limitations,such as poor accuracy,low efficiency,and incapable of drilling in non-conductive materials(e.g.,glass).For the past decades,ultrafast laser has been a reliable tool for such processing due to its unique characteristics.Various hard-to-machine and newer materials,such as glass,diamond,biological materials,and superalloy,can be ablated by ultrafast laser through nonlinear absorption of energy.The pulse is too short that only a small amount of heat transfers to the surrounding of the irradiated zone,leading to minimized heat-affected zone and high processing precision.Although the ultrafast laser has advantages in micro-drilling,some points need to be carefully investigated for practical applications.The quality and processing efficiency of ultrafast laser drilling are affected by processing methods,materials,auxiliary methods and beam characteristics such as pulse energy,frequency,pulse width,polarization,etc.Different process parameters will result in different roundness,taper,defects,and surface quality.The study on process technology parameters is one of the core issues of ultrafast laser micro-hole machining.Recently,many advances have been achieved in the processing technology of ultrafast laser drilling in various materials.However,due to the differences in materials,processing,and auxiliary methods,different studies have different conclusions about the same process parameters.Thus,it is essential to summarize and compare the results of the s

关 键 词：激光技术 超快激光 微孔加工 工艺参数 光束特性 

分 类 号：O439[机械工程—光学工程]