All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range  

作　　者：Xue Wang Junfeng Jiang Shuang Wang Kun Liu Tiegen Liu 

机构地区：[1]School of Precision Instrument and Opto-electronics Engineering,Tianjin Optical Fiber Sensing Engineering Center,Institute of Optical Fiber Sensing of Tianjin University,Key Laboratory of Opto-electronics Information Technology,Tianjin University,Tianjin 300072,China [2]School of Electrical and Electronic Engineering,Engineering Research Center of Optoelectronic Devices and Communication Technology,Ministry of Education,Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology,Tianjin 300384,China

出　　处：《Photonics Research》2021年第4期521-529,共9页光子学研究（英文版）

基　　金：National Natural Science Foundation of China(61505139,61675152,61735011);Natural Science Foundation of Tianjin City(16JCQNJC02000);National Instrumentation Program of China(2013YQ030915);Open Project of Key Laboratory of Opto-electronics Information Technology(2019KFKT007).

摘　　要：Pressure-temperature cross-sensitivity and its accompanying temperature-related stability is a nerve-wracking obstruction for pressure sensor performance in a wide temperature range.To solve this problem,we propose a novel(to the best of our knowledge)all-silicon dual-cavity optical Fabry–Perot interferometer(FPI)pressure sensor.The all-silicon structure has high intrinsic reflectivity and is able to eliminate the influence of thermal-expansion-mismatch-induced stress and chemical-reaction-induced gas generation,and therefore,in essence,enhances measurement accuracy.From the experiment results,the pressure-temperature cross-sensitivity is reduced to be∼5.96 Pa/℃,which presents the lowest pressure-temperature cross-sensitivity among the FPI pressure sensors with the capability of surviving high temperatures up to 700℃ thereby opening the way for high-precision pressure monitoring in various harsh and remote environments.

关 键 词：CAVITY CROSS thereby 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]