真空共晶炉的改进与提升  

Improvement and Upgrade of Vacuum Eutectic Furnace

作　　者：霍灼琴 马海亮 张永聪 HUO Zhuoqin;MA Hailiang;ZHANG Yongcong(The 2nd Research Institute of CETC,Taiyuan 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工业专用设备》2021年第3期54-59,共6页Equipment for Electronic Products Manufacturing

摘　　要：介绍了真空共晶炉,通过热仿真分析得出提高真空共晶炉温度均匀性的方法,对真空共晶炉进行改进,提高了设备的温度均匀性和冷却速率,并对改进后的设备进行了测试,测试结果满足了设计的要求。This paper introduces the vacuum eutectic furnace,obtains the method to improve the temperature uniformity through the thermal simulation analysis,improves the temperature uniformity and cooling rate of the equipment,and tests the improved equipment,the test results meet the design requirements.

关 键 词：真空共晶炉 温度均匀性 冷却速率 热仿真分析 

分 类 号：TN305[电子电信—物理电子学]