3-μm中红外偏振无关且CMOS兼容的石墨烯调制器  

3-μm mid-infrared polarization-independent and CMOS-compatible graphene modulator

作　　者：陆荣国[1] 林瑞 沈黎明 蔡松炜 王玉姣 陈进湛 杨忠华 吕江泊 周勇[1] 王小菊[1] 刘永[1] LU Rong-Guo;LIN Rui;SHEN Li-Ming;CAI Song-Wei;WANG Yu-Jiao;CHEN Jin-Zhan;YANG Zhong-Hua;LYU Jiang-Bo;ZHOU Yong;WANG Xiao-Ju;LIU Yong(State Key Laboratory of Electronic Thin Films and Integrated Devices,School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054,China;Chongqing United Microelectronics Center,Chongqing 401332,China)

机构地区：[1]电子薄膜与集成器件国家重点实验室,光电科学与工程学院,电子科技大学,四川成都610054 [2]重庆微电子中心,重庆401332

出　　处：《红外与毫米波学报》2021年第3期297-301,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Key Research and Development Program of China(2018YFE0201901);the Program for International S&T Co⁃operation Projects of Sichuan Province(2020YFH0108);the National Nature Science Foundation of China(61435010,61307070,61421002,61704021);the Fundamental Research Funds for the Central Universities(ZYGX2019J046)。

摘　　要：文章提出了一种3-μm中红外波段偏振无关且CMOS兼容的石墨烯调制器,器件主要包括两部分:模式转换结构及石墨烯调制器。该调制器不仅满足于CMOS兼容的要求,而且能够实现基膜的偏振无关调制。仿真结果表明该调制器在2.95μm到3.05μm的中红外波段能够实现高于20 dB的消光比,TE和TM模式的插入损耗都低于1.3 dB,其偏振相关损耗低于1.09 dB。通过计算,当器件长度为420μm,能够获得高达9.47 GHz的3 dB带宽。This paper proposes a 3-μm mid-infrared band polarization-independent and CMOS-compatible gra⁃phene modulator,which mainly includes two parts:the mode conversion structure and the graphene modulator.This modulator not only fulfills the requirement of compatibility with CMOS,but also can achieve polarization-in⁃dependent modulation of the fundamental mode.Simulation results show that this modulator can achieve an extinction ratio(ER)higher than 20 dB in the mid-infrared band from 2.95μm to 3.05μm,the insert loss for both TE and TM modes are less than 1.3 dB,and polarization-dependent loss is less than 1.09 dB.Through the calculation,the 3 dB bandwidth up to 9.47 GHz can be obtained when the length of the device is 420μm.

关 键 词：石墨烯调制器 偏振无关 模式转换 中红外 

分 类 号：O43[机械工程—光学工程]