脉冲激光蒸发熔融织构靶制备的YBa_2Cu_3O_(7-δ)超导薄膜  

MICROSTRUCTURE OF YBa_2Cu_3O_(7-δ) SUPERCONDUCTING FILMS PULSED LASER ABLATED FROM A MELT-TEXTURED TARGET

作　　者：王天生[1,2] 田永君[1] 彭炜[3] 胡文斐[3] 李林[3] 

机构地区：[1]燕山大学材料科学与工程学院 [2]中国科学院物理研究所国家超导实验室,北京100080 [3]中国科学院物理研究所国家超导实验室

出　　处：《理化检验（物理分册）》2002年第11期485-488,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：国家自然科学基金资助 (No .5 983 2 0 5 0 )

摘　　要：用脉冲激光蒸发熔融织构靶材在SrTiO3(0 0 1)单晶基片上制备了YBa2 Cu3O7 δ超导薄膜。用X射线衍射仪、透射电镜和原子力显微镜分别对薄膜的微观结构和表面形貌进行了分析。结果表明 ,薄膜呈c轴取向 ,薄膜中有一定数量的颗粒状Y2 O3杂相 ,且具有择优取向 ,而靶材中所含的Y2 BaCuO8相却没有在薄膜中形成。沉积温度升高 ,有利于 [0 0 1]取向 ,但不利于 [111]取向的Y2 O3形成。与传统的粉末烧结靶相比 ,用熔融织构靶制备YBa2 Cu3O7YBa 2Cu 3O 7 δ superconducting films were prepared on SrTiO 3(001) single crystal substrates by pulsed laser ablating melt textured target. The microstructures and the surface morphology of the films were studied by X ray diffractometry, transmission electron microscopy and atomic force microscopy. The results showed that the YBa 2Cu 3O 7 δ superconducting films are c axis oriented. Some Y 2O 3 inclusions particles with certain preferred orientation, rather than Y 2BaCuO 5 particles that contained in the target were formed in the films. As the deposition temperature increased, the formation of oriented Y 2O 3 particles can be promoted, and oriented Y 2O 3 can be inhibited. Comparing to conventional powder sintered target, YBa 2Cu 3O 7 δ superconducting films preparing by using melt textured target can inhibit the droplets formation on the films surface.

关 键 词：脉冲激光蒸发 熔融织构靶 制备 超导薄膜 YBA2CU3O7-Δ Y2O3杂相 微观结构 表面形貌 

分 类 号：O484.1[理学—固体物理]