MEMS压电能量采集器的研究进展  

Research Progress of MEMS Piezoelectric Energy Harvesters

作　　者：董璇 王保志 张成功 王欢 李以贵 Dong Xuan;Wang Baozhi;Zhang Chenggong;Wang Huan;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China;School of Electrical and Electronic Engineering,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418 [2]上海应用技术大学电气与电子工程学院,上海201418

出　　处：《微纳电子技术》2021年第4期279-291,共13页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号);上海市“联盟计划”资助项目(LM201929)。

摘　　要：压电材料可以将机械能转化为电能的特殊性质引起了基于压电材料的能量采集器的研究。概述了压电能量采集器收集能量的原理,分别介绍了压电能量采集器的悬臂梁型、隔膜型和桥型这三种常用结构以及其他结构,介绍了一种利用块状压电陶瓷制作压电悬臂梁的新型工艺。简述了线性拓频和非线性振动拓频两种悬臂梁型能量采集器的带宽优化方法。举例说明了压电能量采集器在基于可穿戴设备的人体运动领域及医学领域中采集能量的实际应用,最后,总结了压电能量采集器的优缺点,对压电型能量采集器未来发展进行了展望。The special property of piezoelectric materials that can convert mechanical energy into electrical energy has led to the research of energy harvesters based on piezoelectric materials.The principle of energy harvesting of piezoelectric energy harvesters is summarized.The three common structures of cantilever type,diaphragm type and bridge type of piezoelectric energy harvesters and other structures are introduced,respectively.A new process of piezoelectric cantilevers fabricated by using block piezolelctric ceramics is introduced.The bandwidth optimization methods of two cantilever beam energy harvesters,linear frequency extension and nonlinear vibration frequency extension,are briefly described.The practical applications of energy harvesting of piezoelectric energy harvesters in the field of human motion based on wearable devices and in the medical field are illustrated by examples.Finally,the advantages and disadvantages of piezoelectric energy harvesters are summarized,and the future development of piezoelectric energy harvesters are prospected.

关 键 词：能量采集器 压电材料 微电子机械系统(MEMS) 带宽优化 可穿戴设备 

分 类 号：TM919[电气工程—电力电子与电力传动] TH703[机械工程—仪器科学与技术]