集成硅纤毛的MEMS矢量水听器的压阻特性  

Piezoresistive Characteristics of the MEMS Vector Hydrophone with Integrated Silicon Cilium

作　　者：齐秉楠 王任鑫[1,2] 史一明 苗晋威 任子明 Qi Bingnan;Wang Renxin;Shi Yiming;Miao Jinwei;Ren Ziming(State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Key Laboratory of Sonar Technology,Hangzhou 310000,China)

机构地区：[1]中北大学动态测试省部共建实验室,太原030051 [2]声纳技术重点实验室,杭州310000

出　　处：《微纳电子技术》2021年第5期403-409,420,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51875535);国防科技重点实验室基金资助项目(6142109KF201804)。

摘　　要：水听器是水下探测的主要仪器,通过对其结构的研究和改进可显著提升其性能。针对现阶段矢量水听器所采用的纤毛二次集成方式所造成的一致性误差较大的问题,以硅纳米膜作为压敏单元,设计了一种新型基于微电子机械系统(MEMS)的压阻式矢量水听器。通过理论及仿真确定最优尺寸,进行一体化工艺流程的设计,将硅纤毛直接集成在二氧化硅梁上,既提高了对准的精度,又缩小了整体尺寸。对制备的水听器芯片进行测试,得到了压敏单元的I-V特性。测试结果表明其阻值达到7 kΩ,同时测得该压敏单元的压阻系数为3.12×10^(-9) Pa^(-1),相比于传统p型[110]体硅压敏单元的压阻系数提高了约4.35倍,压阻系数的提升可以有效提高水听器的灵敏度。此设计能够优化水听器的性能,可为后续水听器的研究和改进提供新的思路。Hydrophone is the main instrument for underwater detection, the performance of the hydrophone can be improved significantly through the research and improvement of its structure. With the silicon nano-membrane as the pressure sensitive unit, a new type of piezoresistive vector hydrophone based on the micro-electromechanical system(MEMS) was designed to solve the problem of the large consistency error caused by the secondary integration approach of the cilium used in the current vector hydrophone. The optimal size was determined by theory and simulation, and the design of integrated technological process was carried out. The silicon cilium was directly integrated on the silica beam, which improves the alignment accuracy and reduces the overall size. The prepared hydrophone chip was tested, and the I-V characteristics of the pressure sensitive unit were obtained. The test result shows that the resistance value is 7 kΩ. Meanwhile, the measured piezoresistive coefficient of the pressure sensitive unit is 3.12×10^(-9) Pa^(-1),which is about 4.35 times higher than that of the pressure sensitive unit of the conventional p-type [110] bulk silicon. The increase of the piezoresistive coefficient can effectively improve the sensitivity of the hydrophone. The design can optimize the performance of the hydrophone, and provide a new idea for the subsequent research and improvement of the hydrophone.

关 键 词：压阻式矢量水听器 微电子机械系统(MEMS) 硅纳米膜 硅纤毛 灵敏度 

分 类 号：TB565.1[交通运输工程—水声工程] TH703[理学—物理]