超构表面红外分光阵列设计  

Design of infrared metasurface splitter arrays

作　　者：王进东 叶文成[4] 张伟婷 崔爱梁 廖清君 WANG Jin-dong;YE Wen-cheng;ZHANG Wei-ting;CUI Ai-liang;LIAO Qing-jun(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Key Laboratory of Infrared Imaging Materials and Devices,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China;Shanghai Experimental School,Shanghai 200135,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]中国科学院红外成像材料与器件重点实验室,上海200083 [3]中国科学院大学,北京100049 [4]上海市实验学校,上海200135

出　　处：《光学精密工程》2021年第4期674-681,共8页Optics and Precision Engineering

基　　金：中科院战略高技术创新基金资助项目(No.CXJJ-19-A04)。

摘　　要：超构表面阵列分光具有高透射、低损耗、高集成度的特点,是当前微纳结构领域的研究热点。本文提出了一种由Si和SiO2组成的超构表面红外分光阵列。以不同波长的红外光入射单元,仅改变圆柱半径,分别计算不同波长的透射率和出射相位随半径的变化。根据广义斯涅尔定律,选择具有不同圆柱半径的若干单元组成超构表面分光周期。该周期对不同波长的入射光具有对应的透射相位梯度,验证了超构表面阵列具有分光功能。对超构表面红外分光阵列可能的应用提出了展望。结果表明:以半径为150,250,300 nm的3个Si纳米柱组成的超构表面周期可以将波长2.7μm和2.9μm的混合入射红外光分离,并且透射率达到70%以上。Splitters for metasurface arrays have the characteristics of high transmission,low loss,and high integration;these have become a current research hotspot for nano structure applications. This paper proposes a metasurface infrared splitter array composed of Si and SiO2. Infrared with different wavelengths was used to enter the unit,and only the radius of the cylinder was changed. The transmittance and phase of the infrared with different wavelengths were calculated based on the radius. According to the generalized Snell’s law,several units with different cylindrical radii were selected to form the splitter period of the metasurface. The period had a corresponding transmission phase gradient for the infrared with different wavelengths. It was verified that the metasurface arrays had a light splitting function. Possible applications of infrared splitter arrays on the metasurface were proposed. The results reveal that the metasurface period composed of three Si nanopillars,with radii of 150,250,and 300 nm,can separate the mixed incident infrared with wavelengths of 2. 7 μm and 2. 9 μm,and the transmittance can become more than 70%.

关 键 词：光电器件 红外分光 超构表面 电介质 相位 

分 类 号：TN214[电子电信—物理电子学] TN211