大离轴量非球面反射镜的加工方法  

Processing method of large off-axis aspheric mirror

作　　者：陈宝华[1] 吴泉英[1] 唐运海 范君柳[1] 王军[1] 孙毅 CHEN Bao-hua;WU Quan-ying;TANG Yun-hai;FAN Jun-liu;WANG Jun;SUN Yi(School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;Graduate Practice Station in Soochow Mason Optics Co.,Ltd.,Suzhou 215028,China)

机构地区：[1]苏州科技大学物理科学与技术学院,江苏苏州215009 [2]苏州苏大明世光学股份有限公司,江苏苏州215028

出　　处：《光学精密工程》2021年第5期1095-1102,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61875145,No.11804243);江苏省先进光学制造技术重点实验室资助项目(No.KJS1710);江苏省十三五重点学科项目资助(No.20168765);苏州市重点实验室资助项目(No.SZS201611,No.SZS201712);江苏省“六大人才高峰”项目资助(No.501100010014)(DZXX-026);江苏省高等学校自然科学研究重大项目资助(No.18KJA470004)。

摘　　要：为了改进大离轴量非球面反射镜加工方式,降低外界因素导致的反射镜面型误差,以及提高效率,本文基于慢刀伺服技术提出一种适用于大离轴量、且不受车床加工口径限制的刀具路径规划方法。以离轴反射镜坐标平移变换的方式,将镜面外边缘与车床主轴中心之间的距离控制在车床加工半径内,减少刀具离轴量和加工区域。坐标平移后的反射镜以主轴中心为原点,多个与之相同的反射镜均匀分布在圆周上,形成一种切削区和过渡区并存的离轴阵列样式。建立样条和正弦混合插值方程,以刀具在边缘切削点的Z向切削速度和切削加速度连续无突变为前提,补正过渡区刀具路径。最后通过实验分析证明:在整个加工区域,过渡区和切削区刀具路径平滑连续,Z轴和C轴平稳运行,加工精度达PV0.4波长@632.8 nm。通过坐标平移的方式,可以有效降低刀具离轴量,补正的刀具路径保证了车床的平稳运行,满足大离轴量的非球面反射镜加工,且一次加工可完成多个反射镜,加工精度和效率高。To improve the method of processing large off-axis aspheric mirrors,reduce the reflector surface error caused by external factors,and improve efficiency,a tool path planning method suitable for large off-axis amounts and not subject to machine processing caliber is proposed based on slow tool servo technology.The distance between the outer edge of the mirror and the spindle center is controlled within the machining radius of the lathe by means of translational transformation of the off-axis mirror coordinate,thereby reducing the amount of tool off-axis and the processing area.The mirror after translation takes the center of the spindle as the origin,and a number of mirrors consistent with this are distributed on the circumference,forming an off-axis array processing method in which the cutting zone and the transition zone coexist,directly avoiding coordinate rotation.Spline and sine mixed interpolation equations are established,based on the premise that the Z-direction cutting speed and cutting acceleration of the tool are continuous without sudden change and smoothly compensate for the tool path of the transition zone.Finally,the experiment proves that,in the entire processing area,the Z axis and C axis run smoothly,and the processing accuracy reaches PV0.4 wavelength@632.8 nm.By means of coordinate translation,the amount of tool off-axis can be effectively reduced.The tool path ensures the smooth operation of the machine and satisfies the processing of aspheric mirrors with large off-axis amount,enabling the completion of multiple mirrors with one-time processing with high processing accuracy and efficiency.

关 键 词：非球面反射镜 大离轴量 慢刀伺服 刀具路径规划 

分 类 号：O439[机械工程—光学工程]