极端环境下声表面波压力传感器研究进展  

Research Progress of Surface Acoustic Wave Pressure Sensors in Extreme Environments

作　　者：潘虹芝 曹健 齐梦珂 程一民 曹亮 牟笑静 PAN Hongzhi;CAO Jian;QI Mengke;CHENG Yiming;CAO Liang;MU Xiaojing(Defense Key Disciplines Lab. of Novel Micro-nano Devices and System Technology, Chongqing University, Chongqing 400044, China)

机构地区：[1]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044

出　　处：《压电与声光》2021年第3期306-312,共7页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(No.2019YFB2004800,No.2019YFB2004803);国家自然科学基金资助项目(No.52075061);中央高校基础研究基金资助项目(No.2019CDCGGD320);重庆大学光电工程学院项目研究生科研和创新基金资助项目(GDYKC202004)。

摘　　要：声表面波压力传感器因具有无源无线、高精度可编码、易于多参数传感集成等优点,被广泛应用于各种极端环境下的压力测量。该文首先介绍了声表面波压力传感器的工作原理及其技术优势,然后分别介绍了声表面波压力传感器在高温和高压环境下的发展现状,并讨论了该类器件的设计难点及未来发展趋势。In recent years,surface acoustic wave pressure sensors have been widely used in pressure measurement in various extreme environments due to their advantages of passive wireless,high-precision encoding,and easy integration of multi-parameter sensing.This review first introduced the working principle and technical advantages of surface acoustic wave pressure sensors.Then the development status of surface acoustic wave pressure sensors in high temperature and high pressure environments were introduced respectively,and the design difficulties and future development trend of such devices were also discussed.

关 键 词：高温 高压 声表面波 压力传感器 

分 类 号：TN384[电子电信—物理电子学]