高纯气体检测系统的研发  

Research and Development of High-purity Gas Detection System

作　　者：王富德 李建浩 WANG Fude;LI Jianhao(Lansis Instrument(Shanghai)Co.,Ltd.,Shanghai 201707,China)

机构地区：[1]朗析仪器(上海)有限公司,上海201707

出　　处：《低温与特气》2021年第3期39-49,共11页Low Temperature and Specialty Gases

摘　　要：超纯气体、高纯气体的检测分析是痕量分析学科的一个分支。其是研究气体纯度分析与其中痕量杂质测定的一门范围较窄但具有现实意义的专业学科。随着我国经济的高速发展,对超纯气体、高纯气体不仅在数量上、质量上、种类上不断地提出新的要求,而且对相应的国家标准、检测理论、方法与检测仪器的研究、研制与生产都提出了更高的要求。经过多年的研发,采用脉冲放电氦离子化检测器,六阀六柱气路分析流程,运用中心切割和反吹分析技术,各组分检测限可达10-9级别,这一方案的研发设计有效的指导生产工艺的控制与改革,确保产品质量。The detection and analysis of ultra-pure gas and high-purity gas is a branch of trace analysis.It is a narrow but practical subject to study gas purity analysis and determination of trace impurities in it.With the rapid development of China's economy,new requirements are constantly put forward on the quantity,quality and variety of ultra-pure gases and high-purity gases,and the corresponding national standards,testing theory,methods and testing equipment research,development and production have put forward higher requirements.After years of research and development,using pulse discharge helium ionization detector,six-valve six-column gas path analysis process,using center cutting and back blowing analysis technology,each component detection limit can reach 10-9 level,the study and design of the program effectively guide the production process control and reform to ensure product quality.

关 键 词：超纯气体 高纯气体 检测分析 痕量 脉冲放电氦离子化检测器 中心切割 反吹 

分 类 号：TQ117[化学工程—无机化工]