基于平面磁场的双列结构绝对式时栅传感器研究  

An Absolute Time-Grating Sensor with Two-Column Structure Based on Planar Magnetic Field

作　　者：陈自然[1] 卜敬 赵有祥 黎锡 冯曦颉 CHEN Ziran;BU Jing;ZHAO Youxiang;LI Xi;FENG Xijie(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《传感技术学报》2021年第4期463-469,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51775075,51935004);重庆市教委科学技术研究项目(KJZD-K201901105);重庆市自然科学基金面上项目(cstc2020jcyj-msxm X0917)。

摘　　要：针对绝对式位置传感器编码复杂和加工工艺要求较高的问题,本文提出了一种基于平面磁场的双列结构绝对式时栅位移测量新方法。研究采用两列不同极距的"几"字型结构定尺绕组产生运动磁场,通过动尺电磁感应方式构造两列空间位移信号,建立两列空间位移信号相位差与运动位移的线性映射关系,通过粗通道定位和精通道测量实现绝对式位移测量。通过理论推导和模型仿真分析证明了绝对式位移测量方法的正确性。制作了PCB传感器样机进行了实验研究,结果表明传感器通过修正后定位精度可达到±9.6μm。此绝对式时栅位移传感器不仅具有结构简单,成本低廉等优势,还有效克服了传统绝对式位置传感器编码复杂和加工工艺要求较高的问题,可应用于复杂机电系统实现精密绝对定位,具有重要应用价值。Aiming at the problems of complex code and high requirements on fabrication for absolute displacement sensors,an absolute displacement measurement method using a time-grating sensor with the two-column structure based on plane magnetic field is proposed.The motional magnetic field is generated by using the different pole-span windings with"几"shape structure on the fixed ruler,and two spatial displacement signals are induced through electromagnetic induction with the moving ruler,and the linear mapping relationship between phase difference of the two spatial displacement signals and the motion displacement is established,and the absolute displacement measurement is realized by means of the pole-number positioning using the rough channel signal and precise displacement measuring using the finer channel signal.The correctness of the absolute displacement measurement method is proved by theoretical derivation and model simulation analysis.A PCB sensor prototype is fabricated for the experimental research.The results show that the positioning accuracy of the sensor can reach±9.6μm after error correction.The proposed absolute time-grating displacement sensor not only has the advantages of simple structure and low cost,but also effectively overcomes the problems of complex code and high requirements on fabrication for traditional absolute displacement sensors.It can be applied to the complex electromechanical system to achieve precise absolute positioning,which has a significant potential for applications.

关 键 词：绝对式 直线位移测量 时栅传感器 双列结构 

分 类 号：TH7[机械工程—仪器科学与技术]