石英晶体真空退火炉控温系统设计研究  

Design and Research on Temperature Control System of Quartz Crystal Vacuum Annealing Furnace

作　　者：崔京华[1] 王惠贞[2] 苗旭辉 CUI Jinghua;WANG Huizhen;MIAO Xuhui(School of Mechanical and Electrical Engineering,Hebei Chemical&Pharmaceutical College,Shijiazhuang Hebei 050026;School of Mechanical and Electrical Engineering,Hebei Jiaotong Vocational and Technical College,Shijiazhuang Hebei 050091;Hebei Province Water Conservancy Bureau,Shijiazhuang Hebei 050021)

机构地区：[1]河北化工医药职业技术学院机电工程系,河北石家庄050026 [2]河北交通职业技术学院机电工程系,河北石家庄050091 [3]河北省水利工程局,河北石家庄050021

出　　处：《河南科技》2021年第8期50-52,共3页Henan Science and Technology

基　　金：河北化工医药职业技术学院院级课题项目(YZ201412)。

摘　　要：众所周知,在真空热处理诸多工艺中,真空退火是最具代表性的工艺之一。真空退火最常用的设备是真空退火炉。真空退火炉的工作原理是利用技术来对温度进行精准调控,温度调控精度的高低会对工件综合质量产生至关重要的影响。因此,真空退火炉智能温度控制系统的设计与探究一直以来都备受关注。本文以石英晶体真空退火炉为主要研究对象,对智能温度控制系统的相关内容进行深入分析和探究。As we all know,among many vacuum heat treatment processes,vacuum annealing is one of the most repre⁃sentative processes.The most commonly used equipment for vacuum annealing is the vacuum annealing furnace.The working principle of the vacuum annealing furnace is to use technology to precisely control the temperature.The high and low precision of temperature control will have a vital impact on the overall quality of the workpiece.Therefore,the design and exploration of the intelligent temperature control system of the vacuum annealing furnace has always attracted much attention.This paper took the quartz crystal vacuum annealing furnace as the main research object,and conducted in-depth analysis and exploration on the related content of the intelligent temperature control system.

关 键 词：石英晶体 真空退火炉 智能温度控制系统 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]