基于自组装金纳米颗粒的化学电阻传感器  

Chemical Resistance Sensors Based on Self-Assembled Gold Nanoparticles

作　　者：唐嫒尧 李明虓 程洁 黄成军[1,3] Tang Aiyao;Li Mingxiao;Cheng Jie;Huang Chengjun(R&D Center of Healthcare Electronics,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;School of Microelectronics,University of Chinese Academy of Sciences,Beijing 101400,China;School of Future Technology,University of Chinese Academy of Sciences,Beijing 101400,China)

机构地区：[1]中国科学院微电子研究所健康电子研发中心,北京100029 [2]中国科学院大学微电子学院,北京101400 [3]中国科学院大学未来技术学院,北京101400

出　　处：《微纳电子技术》2021年第7期604-611,626,共9页Micronanoelectronic Technology

基　　金：国家重点研发计划资助项目(2020YFC2004503);北京市科技新星计划资助项目(Z20110000682083)。

摘　　要：通过Au—S键的自组装作用,制备了不同功能单体修饰的金纳米颗粒(AuNP),采用扫描电子显微镜(SEM)对制备材料的微观形貌进行了表征,并使用滴铸法制成了电阻式气体传感器,对其气敏性能进行了测试。实验结果表明,基于11-巯基-1-十一醇(MUD)功能化的AuNP化学电阻传感器的气敏性能最佳,在室温条件下,对1×10^(-6)异丙醇(IPA)蒸气响应值可达5.0%,是未功能化AuNP化学电阻传感器响应值的4.7倍。MUD功能化的AuNP化学电阻传感器线性范围为1×10^(-6)~1×10^(-5),相关系数R^(2)=0.993,检出限(LOD)为7.6×10^(-7)。同时,该传感器表现出优异的IPA选择性,且具有良好的恢复性和重复性。该传感器操作简单、成本低廉,在IPA气体检测方面有重要的应用价值。Gold nanoparticles(AuNPs)modified with different functional monomers were prepared through Au—S bonds self-assembly.The micro morphology of the prepared materials was characterized by scanning electron microscope(SEM).The resistive gas sensor was prepared by drop casting method,and its gas sensing properties were tested.The experimental results indicate that the AuNP chemical resistance sensor functionalized with 11-mercapto-1-undecol(MUD)has the best gas sensing property,and the response value to 1×10^(-6)isopropanol(IPA)vapor reaches 5.0%at room temperature,which is 4.7 times that of the unfunctionalized AuNP chemical resistance sensor.The linear range of the MUD functionalized chemical resistance sensor is 1×10^(-6)to 1×10^(-5),correlation coefficient R^(2)is 0.993,and the limit of detection(LOD)is 7.6×10^(-7).Meanwhile,the sensor exhibits excellent IPA selectivity,good recovery and repeatability.The sensor is of simple operation and low cost,and has important application value in IPA gas detection.

关 键 词：气体传感器 纳米颗粒 自组装 滴铸法 气敏性能 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]