基于SU-8聚合物波导的多模干涉型RGB合波器  

Multi-mode interference type RGB beam combiner based on SU-8 polymer waveguide

作　　者：刘帆 隋国荣[1] LIU Fan;SUI Guorong(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2021年第3期9-15,共7页Optical Instruments

摘　　要：针对现有的RGB合波器分立元件多、结构复杂、成本高等问题,同时为了满足器件的微型化发展和高效率传输的需求,设计了一种基于SU-8聚合物波导的多模干涉型(MMI)RGB合波器。该合波器通过2个级联的2×1MMI对RGB三个波长进行组合,第一级MMI使R(660 nm)、B(440 nm)光束进行组合输出,第二级MMI使R、B组合光束与G(550 nm)光束进行组合输出。通过对光束传播的仿真,优化了合波器的结构参数,验证了该合波器的有效性。研究结果表明,合波器对RGB三个工作波长的平均传输效率为94.02%,外型尺寸可小到0.04 mm×3.60 mm,并具有较大的工艺制作容差和较小的波长依赖性。该合波器结构简单,便于集成,在保证三个工作波长均获得较高传输效率的前提下实现了器件尺寸微型化,可为未来微型显示器件的研究提供参考。In order to meet the needs of device miniaturization and high transmission efficiency,a kind of multi-mode interferometric(MMI)RGB beam combiner based on SU-8 polymer waveguide was proposed.The feasibility of the RGB beam combiner was verified by three-dimensional beam propagation simulation.The RGB beam combiner combined the three wavelengths of RGB through two cascaded 2×1 MMI.The first stage MMI output combined R(660 nm)and B(440 nm)beams,and the second stage MMI output R,B combined beams with G(550 nm)beam.By optimizing the device structure,the final results showed that the average transmission efficiency of the three working wavelengths of RGB reached 94.02%,and the size was reduced to 0.04 mm×3.60 mm.In addition,larger processing tolerance and smaller wavelength dependence were obtained.This design has the advantages of simple structure,easy integration,and miniaturization of device size and high transmission efficiency for all three working wavelengths.It can provide a reference for further research on micro display devices in the future.

关 键 词：RGB合波器 SU-8聚合物 多模干涉 微型显示 

分 类 号：O436[机械工程—光学工程]