基于GMR的机床振动传感器设计与性能分析  

Design and Performance Analysis of Machine Tool Vibration Sensor Based on GMR

作　　者：王晓燕[1] 刘亚伟 刘立兵 赵方[1] WANG Xiaoyan;LIU Yawei;LIU Libing;ZHAO Fang(Material Engineering Department of Zhengzhou Technical College,Zhengzhou,Henan,450121,China;Research Department of Dongguan Xinke Technology Development Co.,Ltd.,Dongguan,Guangdong,523000,China)

机构地区：[1]郑州职业技术学院材料工程系,河南郑州450121 [2]东莞新科技术开发有限公司研发部,广东东莞523000

出　　处：《工程建设（维泽科技）》2021年第7期59-64,共6页Engineering Construction

基　　金：河南省重点研发与推广专项“基于新型传感技术的数控机床状态监测与自适应控制系统研究”阶段成果,项目编号:192102210062,主持人:王晓燕。

摘　　要：依据精密加工过程中机床振动频率特点,设计了一种基于巨磁阻单元的三轴加速度传感器。该三轴加速度传感器机械感应部分采用对称四翼式结构,通过合理布局巨磁阻单元构成的惠斯通电桥测量三个方向的加速度,机械感应部分与信号输出部分的一体化设计大大减小了产品体积。对三轴加速度传感器进行了灵敏度仿真与试验,详细分析了仿真与试验的结果。According to the vibration frequency characteristics of machine tool in the process of precision machining,a three-axis acceleration sensor based on giant magnetoresistance unit is designed.The mechanical sensing part of the three-axis acceleration sensor adopts a symmetrical four wing structure,and the acceleration in three directions is measured by a Wheatstone bridge composed of a reasonable layout of giant magnetoresistance unit.The integrated design of the mechanical sensing part and the signal output part greatly reduces the volume of the product.The sensitivity of three-axis acceleration sensor is simulated and tested,and the results of simulation and test are analyzed in detail.

关 键 词：机床振动 巨磁阻(GMR) 加速度传感器 一体化设计 灵敏度仿真与试验 

分 类 号：TN929.5[电子电信—通信与信息系统] TP212.9[电子电信—信息与通信工程]