二维原子晶体的转移堆叠方法及其高质量电子器件的研究进展  

Recent progress of transfer methods of two-dimensional atomic crystals and high-quality electronic devices

作　　者：王浩林 宗其军 黄焱 陈以威 朱雨剑 魏凌楠 王雷 Wang Hao-Lin;Zong Qi-Jun;Huang Yan;Chen Yi-Wei;Zhu Yu-Jian;Wei Ling-Nan;Wang Lei(Collaborative Innovation Center of Advanced Microstructures,National Laboratory of Solid-State Microstructures,School of Physics,Nanjing University,Nanjing 210093,China;School of Advanced Materials and Nanotechnology,Xidian University,Xi’an 710126,China)

机构地区：[1]南京大学物理学院,固体微结构物理国家重点实验室,人工微结构科学与技术协同创新中心,南京210093 [2]西安电子科技大学先进材料与纳米科技学院,西安710126

出　　处：《物理学报》2021年第13期363-396,共34页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:12074173,61804117);陕西省自然科学基础研究计划(批准号:2018JQ5162);南京大学技术创新基金资助的课题.

摘　　要：可剥离至原子层厚度的层状材料被称为二维原子晶体,是凝聚态物理研究的前沿材料体系之一.与体材料相比,二维原子晶体的原子完全暴露,对外界环境极为敏感,因此剥离、转移、旋转、堆叠、封装和器件加工技术对于其电子器件质量和电学输运性质研究尤为关键.本文介绍了二维原子晶体转移工艺的重要发展,尤其是对其二维电子气的输运性质有突破性提升的进展.针对基于二维原子晶体的电子器件,从二维电子气的无序、接触电阻、载流子迁移率、可观测的量子霍尔态等角度衡量器件质量,并详细介绍了与之相对应的转移技术、器件结构与加工工艺.Two-dimensional atomic crystals(2DACs)are the layered materials that can be exfoliated into the thickness of one unit cell,and attract extensive attention in current condensed matter physics.The atoms contained in a 2DAC are completely exposed,thus rendering them extremely sensitive to the external environment.Therefore,the exfoliation,transfer,rotation,stacking,encapsulation and device fabrication processes are particularly important for the electronic device quality and electrical transport properties of 2DACs.We review the recent progress of the transfer methods for 2DACs,especially the milestones in the improving of the transport properties of these two-dimensional electron gases(2DEGs).For electronic devices based on 2DACs,the quality of the devices is evaluated in terms of the disorder of 2DEG,contact resistance,carrier mobility,and observed quantum Hall states,and their corresponding transfer technology,device structure and fabrication processes are also discussed in detail.

关 键 词：二维原子晶体 转移方法 二维异质结 电输运 

分 类 号：TN04[电子电信—物理电子学]